A highly sensitive probe based on the skin effect was developed to measure thin film permeability. A new **Toei Scientific Industrial Company Ltd., 1-101-60 Medeshimadai, Natori 981-1251, Japan ***Candox Systems Inc., 15-21 Oshiage-Cho, Gyoda 361-0045, Japan ****Graduate School of Engineering, Tohoku University, 6-6-05 Aramaki Aza Aoba, Aoba -ku, Sendai 980-8579, Japan A highly sensitive probe based on the skin effect was developed to measure thin film permeability. A new microstrip-line-type probe on a flexible substrate was fabricated and placed in contact with a magnetic thin film. The probe enhanced the signal-to-noise ratio and broadband measurement. The permeability of amorphous CoNbZr film