Accurate characterization of SiO&lt;sub&gt;2&lt;/sub&gt; thin films using surface acoustic waves

Knapp, Matthias; Lomonosov, Alexey M.; Warkentin, Paul A.; Jager, Philipp; Ruile, W.; Kirschner, H.-P.; Honal, Matthias; Bleyl, Ingo; Mayer, Andreas; Reindl, L.

doi:10.1109/tuffc.2014.006921

Cited by 8 publications

(9 citation statements)

References 17 publications

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“…The two second-order elastic constants and mass density of the isotropic SiO 2 film are provided in [37] (second row in Table II). Our sources for the three TOECs are [38,39] and for the four FOECs [40].…”

Section: Materials Constants For Siomentioning

confidence: 99%

“…The linear admittance of this system is shown in Figure 4 for two different sets of second-order elastic moduli (Lamé constants) of the SiO 2 film. The constants provided in [37] were measured in films, whereas those of [39] refer presumably to bulk material. This leads to a difference of about 7 MHz in the resonance frequency and also a shift of the feature at about 910 MHz, which corresponds to a mode of predominantly shear-horizontal polarization.…”

Section: Imd3 and Third-harmonic Current For The Infinite Periodic Sy...mentioning

confidence: 99%

“…Black dotted: Second-order and third-order elastic constants for SiO2 film from [37,38], material constants for LiNbO3 in S (2) from [35,36], S (3) for LiNbO3 equal to zero. Red: Second-order and third-order elastic constants for SiO2 film from [37,38], material constants for LiNbO3 in S (2) from [35,36], in S (3) for LiNbO3 only second-order and third-order elastic constants accounted for [35,36]. Green: Second-order and third-order elastic constants for SiO2 film from [37,38], S (2) and S (3) for LiNbO3 equal to zero.…”

Section: Imd3 and Third-harmonic Current For The Infinite Periodic Sy...mentioning

confidence: 99%

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FEM Modeling of Electro-Acoustic Nonlinearities in Surface Acoustic Wave Devices: A Methodological Review

Mayer

Mayer³

et al. 2023

Acoustics

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In the framework of electro-elasticity theory and the finite element method (FEM), a model is set up for the computation of quantities in surface acoustic wave (SAW) devices accounting for nonlinear effects. These include second-order and third-order intermodulations, second and third harmonic generation and the influence of electro-acoustic nonlinearity on the frequency characteristics of SAW resonators. The model is based on perturbation theory, and requires input material constants, e.g., the elastic moduli up to fourth order for all materials involved. The model is two-dimensional, corresponding to an infinite aperture, but all three Cartesian components of the displacement and electrical fields are accounted for. The first version of the model pertains to an infinite periodic arrangement of electrodes. It is subsequently generalized to systems with a finite number of electrodes. For the latter version, a recursive algorithm is presented which is related to the cascading scheme of Plessky and Koskela and strongly reduces computation time and memory requirements. The model is applied to TC-SAW systems with copper electrodes buried in an oxide film on a LiNbO3 substrate. Results of computations are presented for the electrical current due to third-order intermodulations and the displacement field associated with the second harmonic and second-order intermodulations, generated by monochromatic input tones. The scope of this review is limited to methodological aspects with the goal to enable calculations of nonlinear quantities in SAW devices on inexpensive and easily accessible computing platforms.

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Section: Materials Constants For Siomentioning

confidence: 99%

Section: Imd3 and Third-harmonic Current For The Infinite Periodic Sy...mentioning

confidence: 99%

Section: Imd3 and Third-harmonic Current For The Infinite Periodic Sy...mentioning

confidence: 99%

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FEM Modeling of Electro-Acoustic Nonlinearities in Surface Acoustic Wave Devices: A Methodological Review

Mayer

Mayer³

et al. 2023

Acoustics

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“…This method was used to study the mechanical properties of silicon dioxide films [ 3 ], nanocomposite films based on low-pressure polyethylene [ 4 ], mycelial films [ 5 , 6 , 7 ], and chitosan films [ 8 , 9 ] in the presence of various gases. There is also an approach in which surface acoustic waves are used to determine the mechanical properties of films [ 10 ]. The longitudinal and shear moduli of elasticity, as well as the density of silicon dioxide films, were determined in this work.…”

Section: Introductionmentioning

confidence: 99%

The Study of the Acoustic Characteristics of Chitosan Acetate Film Using a Radial Electric Field Excited Resonator

Teplykh

Зайцев

Semyonov

et al. 2023

Sensors

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Currently, the lateral electric field excited resonators are used for the creation of various sensors. We have recently proposed a new type of acoustic resonator called radial electric field excited disk acoustic resonator. The advantage of this type of resonator is its high sensitivity to mechanical and electrical boundary conditions on its free surface. This makes it possible to determine both the acoustic and electrical properties of a thin layer of material deposited on the free end of the resonator. In this work, we used a radial electric field excited disk acoustic resonator of Russian-made barium plumbum zirconate titanate (BPZT) piezoceramics. With the help of this resonator, the material constants for the piezoceramic sample were refined, and their temperature dependencies were determined. Then, this resonator was used to determine the elastic modulus, viscosity, and conductivity of the chitosan acetate film in air and ammonia vapors of various concentrations. It was shown that the chitosan acetate film under the influence of ammonia vapor significantly changes its mechanical properties and increases its electrical conductivity thousands of times, and then completely restores its properties.

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“…SAW temperature sensors work by detecting disturbances in the acoustic wave propagation characteristics caused by physical and chemical parameters, realizing detection of the measured parameters [ 12 , 13 , 14 , 15 ]. For example, SAW is used to measure temperature wirelessly and to characterize SiO 2 thin films accurately [ 16 , 17 , 18 ]. However, the chemical properties of SAW substrates are unstable, limiting their application in high-temperature environments [ 19 ].…”

Section: Introductionmentioning

confidence: 99%

AlN-Based Ceramic Patch Antenna-Type Wireless Passive High-Temperature Sensor

et al. 2017

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An aluminum nitride (AlN) based patch antenna-type high-temperature wireless passive sensor is reported to operate as both a sensor and an antenna, which integrates in situ measurement/sensing with remote wireless communication at the same time. The sensor is small, easy to manufacture, highly sensitive and has a high operating temperature; it can be used in high-temperature, chemically corrosive and other harsh environments. The sensing mechanism of the sensor, the dielectric constant of the AlN ceramic substrate, increases with rising temperature, which reduces the resonant frequency of the sensor. Thus, the temperature can be measured by detecting changes in the sensor’s resonant frequency. High-Frequency Simulation Structure (HFSS) software is used to determine the structure and size of the sensor, which is then fabricated using thick-film technology. The substrate of the sensor is AlN ceramic due to its outstanding thermal resistance at high temperature; and its conductors (the radiation patch and the ground under the substrate) are silver-palladium alloy sintered form silver–palladium paste. A vector network analyzer reveals that the sensor’s operating range extends to 700 °C. Furthermore, its resonant frequency decreases from 2.20 GHz to 2.13 GHz with increasing temperature from room temperature (25 °C) to 700 °C, with an absolute sensitivity of 104.77 KHz/°C. Our work verifies the feasibility of measuring high temperatures using AlN-based patch antenna wireless passive temperature sensors, and provides a new material and temperature sensitive structure for high-temperature measurement in harsh environments.

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Accurate characterization of SiO<sub>2</sub> thin films using surface acoustic waves

Cited by 8 publications

References 17 publications

FEM Modeling of Electro-Acoustic Nonlinearities in Surface Acoustic Wave Devices: A Methodological Review

FEM Modeling of Electro-Acoustic Nonlinearities in Surface Acoustic Wave Devices: A Methodological Review

The Study of the Acoustic Characteristics of Chitosan Acetate Film Using a Radial Electric Field Excited Resonator

AlN-Based Ceramic Patch Antenna-Type Wireless Passive High-Temperature Sensor

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