Sensors 1995
DOI: 10.1002/9783527620180.ch5
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Acoustic Wave Devices

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Cited by 10 publications
(11 citation statements)
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“…Utilizing the inverse piezoelectric effect, a SAW is excited by applying an electrical voltage on an (input) IDT that is patterned on a piezoelectric material. The mechanical wave propagates perpendicular to the direction of the IDT in both directions on the surface of the piezoelectric substrate ([ 5 ], p. 139). For sensing applications the substrate’s surface is frequently coated with an additional layer which reacts to changes of the physical quantity to measure and, in turn, alters the propagating wave in its amplitude and in its velocity.…”
Section: Introductionmentioning
confidence: 99%
“…Utilizing the inverse piezoelectric effect, a SAW is excited by applying an electrical voltage on an (input) IDT that is patterned on a piezoelectric material. The mechanical wave propagates perpendicular to the direction of the IDT in both directions on the surface of the piezoelectric substrate ([ 5 ], p. 139). For sensing applications the substrate’s surface is frequently coated with an additional layer which reacts to changes of the physical quantity to measure and, in turn, alters the propagating wave in its amplitude and in its velocity.…”
Section: Introductionmentioning
confidence: 99%
“…Perturbation formulas for many cases such as mechanical loading, viscoelastic loading, electrical loading, and fluid loading and for many wave types may be found in the literature [8,9].…”
Section: Analytical Approachesmentioning
confidence: 99%
“…Two SAW device structures are most widely used. A delay line essentially consists of two IDTs placed some distance apart, whereas a resonator has additional reflector gratings to confine the wave energy inside a resonant cavity ([16], p. 141). In most cases, the SAW device is coated with a certain material that interacts with the physical quantity to be measured and, in turn, leads to an alteration of the wave propagating along the substrate’s surface.…”
Section: Introductionmentioning
confidence: 99%