Activation process of reversible Pd thin film hydrogen sensors

Ollagnier, Antonin; Fabre, Arnaud; Thundat, Thomas; Finot, Éric

doi:10.1016/j.snb.2013.05.041

Cited by 24 publications

(22 citation statements)

References 28 publications

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“…In the hydrogen milieu, the microroll changes from a curved state to a planar state under the volume expansion of the Pd layer with a response time of several seconds, which leads to the enhanced macroscopic visual detection of hydrogen that benefits from the large array of ultra‐thin membranes. As shown in Figure c, Ollagnier et al prepared a microcantilever, with a 30 nm Pd layer coated on bare silicon, to detect hydrogen pressure . The different hydrogen pressures were deduced from the changing position of a laser spot reflected from a bending microcantilever.…”

Section: Applicationsmentioning

confidence: 99%

Section: Applicationsmentioning

confidence: 99%

“…As shown in Figure 5c, Ollagnier et al prepared a microcantilever, with a 30 nm Pd layer coated on bare silicon, to detect hydrogen pressure. [82] The different hydrogen pressures were deduced from the changing position of a laser spot reflected from a bending microcantilever. Furthermore, Han et al…”

Section: Pd Actuationmentioning

confidence: 99%

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Inorganic Stimuli‐Responsive Nanomembranes for Small‐Scale Actuators and Robots

Tian

Wang

Chen

et al. 2020

Advanced Intelligent Systems

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The term small‐scale robotics describes a wide variety of miniature robotic systems, ranging from millimeter‐sized devices down to autonomous mobile systems with dimensions measured in nanometers. These systems can perform complex tasks that are impossible for humans to accomplish or at scales that humans cannot reach. In recent years, the rapid advancement of small‐scale robotics has benefited from the progress in synthesis and nanotechnology, providing access to nanomembranes with stimuli‐responsive materials, such as phase transition materials, shape memory alloys, and palladium. These materials are 2D sheets with a thickness ranging from 5 to 500 nm, and they have the ability to change their shape reversibly under extremal stimuli. Together with strain engineering for deterministic assembly, various stimuli‐responsive actuators and robots have been fabricated for medicine, manufacturing, and exploration by endowing them with the combined features of a continuously deformable structure, remote operation, and several degrees of freedom. Herein, the recent achievements in small‐scale actuators and robots based on inorganic stimuli‐responsive nanomembranes are reviewed and their advantages and properties highlighted.

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Section: Applicationsmentioning

confidence: 99%

Section: Applicationsmentioning

confidence: 99%

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Inorganic Stimuli‐Responsive Nanomembranes for Small‐Scale Actuators and Robots

Tian

Wang

Chen

et al. 2020

Advanced Intelligent Systems

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“…This behavior might be determined, on one hand, by the long time for full desorption of tested sensor necessary when a high level of the hydrogen concentration is used. On the other hand, possible phase changes of the catalytic gate metal can occur, particularly when Pd is used [42]. Switching the H 2 MFC-ON/OFF, we see that the sensor responds more quickly, in only 5 s, while the recovery times are about 6 s. Regarding the response/recovery transients of the sensor maintained at 450 K for different hydrogen concentrations, we observed an increase of both response and recovery times, but they are no longer than 14 s at 20 ppm, which further demonstrate the good performances of the experimental structures.…”

Section: Sic-based Mos Capacitor Hydrogen Sensormentioning

confidence: 99%

A new 4H-SiC hydrogen sensor with oxide ramp termination

Pascu

Kusko

Crǎciunoiu

et al. 2016

Materials Science in Semiconductor Processing

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“…In addition, low power consumption is important for continuous monitoring in battery driven devices. 9,10 Against this background, we proposed a capacitive MEMS hydrogen sensor using Pd-based metallic glass (MG) as a sensing film ( Figure 1). For example, catalytic type sensors are based on detecting the temperature rise produced by the combustion heat of oxygen and combustible gas using catalysts such as Pd (palladium) or Pt (platinum).…”

Section: Introductionmentioning

confidence: 99%

A Review of Capacitive MEMS Hydrogen Sensor using Pd based Metallic Glass with Fast Response and Low Power Consumption

et al. 2018

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This paper reports on a capacitive MEMS hydrogen sensor using Pd-based metallic glass (MG) for future hydrogen society. First, we investigate PdCuSi as a Pd-based MG and show that this material is promising for capacitive MEMS hydrogen sensor. Second, we employ the Pd-based MG in a hydrogen sensor that has an inverted Tshaped electrode. The sensor is fabricated by a surface micromachining process. We show that the fabricated hydrogen sensor exhibits hysteresis-free and fast response properties at room temperature. K E Y W O R D Scapacitive, hydrogen sensor, hydrogen society, MEMS, Pd-based metallic glass 2 SENSING FILMS Pd-based metallic glassPd has excellent hydrogen absorption characteristics but hydrogen is absorbed as a metal hydride, and as a result, the response to hydrogen is slow, and heat is required to release 70

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Activation process of reversible Pd thin film hydrogen sensors

Cited by 24 publications

References 28 publications

Inorganic Stimuli‐Responsive Nanomembranes for Small‐Scale Actuators and Robots

Inorganic Stimuli‐Responsive Nanomembranes for Small‐Scale Actuators and Robots

A new 4H-SiC hydrogen sensor with oxide ramp termination

A Review of Capacitive MEMS Hydrogen Sensor using Pd based Metallic Glass with Fast Response and Low Power Consumption

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