Adjustable response of PZT thin film based piezoelectric micro-actuator through DC bias pre-polarization

Gong, Dongdong; Qin, Feng; Wang, Yichen; Chen, Yu; Yang, Tingting; Sun, Xiangyu

doi:10.1016/j.sse.2019.107675

Cited by 10 publications

(5 citation statements)

References 15 publications

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“…This may be attributed to the tendency of c-domains alignment to electrical field, where the volume fraction of c-domains was increasing with increased voltage [29]. This mechanism was also demonstrated in piezoelectric ceramics [30]. Similar to relative dielectric constant ε r , transverse piezoelectric coefficient e 31,f manifest consistent values across the wafer surface, especially at saturation voltage (>7.5 V).…”

Section: Resultsmentioning

confidence: 66%

Excellent Uniformity and Properties of Micro-Meter Thick Lead Zirconate Titanate Coatings with Rapid Thermal Annealing

Song

Zhao

et al. 2023

Materials

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Lead zirconate titanate (PZT) films have shown great potential in piezoelectric micro-electronic-mechanical system (piezo-MEMS) owing to their strong piezoelectric response. However, the fabrication of PZT films on wafer-level suffers with achieving excellent uniformity and properties. Here, we successfully prepared perovskite PZT films with similar epitaxial multilayered structure and crystallographic orientation on 3-inch silicon wafers, by introducing a rapid thermal annealing (RTA) process. Compared to films without RTA treatment, these films exhibit (001) crystallographic orientation at certain composition that expecting morphotropic phase boundary. Furthermore, dielectric, ferroelectric and piezoelectric properties on different positions only fluctuate within 5%. The relatively dielectric constant, loss, remnant polarization and transverse piezoelectric coefficient are 850, 0.1, 38 μC/cm2 and −10 C/m2, respectively. Both uniformity and properties have reached the requirement for the design and fabrication of piezo-MEMS devices. This broadens the design and fabrication criteria for piezo-MEMS, particularly for piezoelectric micromachined ultrasonic transducers.

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Section: Resultsmentioning

confidence: 66%

Excellent Uniformity and Properties of Micro-Meter Thick Lead Zirconate Titanate Coatings with Rapid Thermal Annealing

Song

Zhao

et al. 2023

Materials

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“…[ 77 ] Recently, Gong et al. [ 78 ] fabricated lead zirconate titanate thin film by magnetron sputtering technique and reported the influence of pretreatment on performance of material as well as device through conducting large number of tests. The outcomes of the tests disclosed that the pre‐polarization treatment effectively improves the performance of dielectric, ferroelectric, and piezoelectric properties of the prepared thin film.…”

Section: Applications Of Piezoelectric Materialsmentioning

confidence: 99%

A Review on Piezoelectric Materials and Their Applications

Sekhar

Veena²,

Kumar

et al. 2022

Cryst. Res. Technol.

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Piezoelectric materials have the merits of fast response, speed, and high precision. These materials have been widely investigated for functional device applications such as sensors, actuators, microelectromechanical systems (MEMS), nanoelectromechanical systems (NEMS), 3D-printing etc. This paper offers a review on recent advances in piezoelectric materials and their limitations. In addition, different piezoelectric materials such as lead-based, lead-free piezoelectric materials etc. are discussed, and their applications in the catalysis, energy harvesting, sensors, biomedical engineering, and additive manufacturing are addressed.

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“…Firstly, a magnetron sputtering 3 µm PZT layer and its upper and lower electrodes are grown on the SOI wafer surface, forming a typical piezoelectric 'sandwich' structure. The details of magnetron sputtering process and x-ray diffraction pattern of the PZT film are in our previous research [30]. Both the upper and lower electrodes are Pt/Ti double-layer electrodes with a total thickness of 100 nm, so as to form good ohmic contact.…”

Section: Fabricationmentioning

confidence: 99%

A dual-frequency piezoelectric micromachined ultrasound transducer array with low inter-element coupling effects

Liu¹,

Ji²,

Xing³

et al. 2021

J. Micromech. Microeng.

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This paper presents a dual-frequency piezoelectric micromachined ultrasonic transducer (PMUT) line array with low crosstalk level, which was fabricated on silicon-on-insulator (SOI) wafers with sputtered piezoelectric thin film (PZT) and Si diaphragm structure. The obtained array consists of 120 of 0.77 MHz and 192 of 2.30 MHz PMUT units in total with minimum interspace of 50 μm. Due to the high piezoelectric coefficient of PZT, the PMUT shows high transmitting sensitivity in air and good effective electromechanical coupling factor. The displacement sensitivities are assessed to be 595 nm V−1 and 112 nm V−1 at the resonant frequencies of 0.77 MHz and 2.30 MHz respectively in air. To reduce the vibration coupling, rectangular grooves in the bottom silicon are designed between the adjacent line elements, and the PMUT units in the array are arranged in a mis-aligned style. Modal analysis for the 0.77 MHz units indicates neighbouring coupling-vibration decreases greatly from 44.5% to 14.8% of the excited vibration when the excited line is driven at 4Vpp, which proves both the grooves and the mis-aligned ranking are effective for coupling effect reduction. Moreover, results indicate the coupling effect between different frequencies can be ignored due to their inherent resonance characteristics. The sound pressures for a single 0.77 MHz line element and 2.30 MHz line element are evaluated to be 53 kPa and 73 kPa at a distance of 1 cm in water. This high performance dual-frequency PMUT line array makes some high resolution imaging methods possible based on PMUT technology, such as those of dual-frequency, total focus.

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Adjustable response of PZT thin film based piezoelectric micro-actuator through DC bias pre-polarization

Cited by 10 publications

References 15 publications

Excellent Uniformity and Properties of Micro-Meter Thick Lead Zirconate Titanate Coatings with Rapid Thermal Annealing

Excellent Uniformity and Properties of Micro-Meter Thick Lead Zirconate Titanate Coatings with Rapid Thermal Annealing

A Review on Piezoelectric Materials and Their Applications

A dual-frequency piezoelectric micromachined ultrasound transducer array with low inter-element coupling effects

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