Advanced multi-component nanostructures designed by dynamic shadowing growth

He, Yan‐Bing; Zhao, Yiping

doi:10.1039/c1nr10103j

Cited by 81 publications

(71 citation statements)

References 146 publications

(201 reference statements)

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“…Reported examples include metals (Al, Ag, Bi, C, Co, Cr, Cu, Mg, Mn, Ni, Pt, Ti,W, Zn), semiconductors (Si, Ge), and compound semiconductors (MgF 2 , CaF 2 , ITO, SiO 2 , SiO, ZrO 2 , MgO, YBCO, ZnO, TiO 2 , WO 3 ). [ 135 ] Further, multilayered, composite, and doped structures have been demonstrated by evaporating or co-sputtering multiple sources as shown in Figure 22 . GLAD of anisotropic sculptured organic fi lms has also been demonstrated.…”

Section: Glancing Angle Depositionmentioning

confidence: 98%

“…(b) Inclined pillars (MgF 2 ), [ 27 ] (c) zigzag pillars (MgF 2 ), [ 27 ] (d) helical pillars (MgF 2 ), [ 12 ] and (e) straight pillars (Si). [ 135 ] Reproduced with permission, [ 27 ] copyright 2007 AIP. Reproduced with permission, [ 12 ] copyright 1996 AAAS.…”

Section: Figure 21 Glancing Angle Deposition (Glad) (A)mentioning

confidence: 98%

“…(a) Two deposition sources located at different angles and directions with respect to the substrate. [ 135 ] (b) Two deposition sources located at the same angle but opposite directions. [ 135 ] (c) Two deposition sources located at the angle and the same direction from the substrate.…”

Section: Figure 21 Glancing Angle Deposition (Glad) (A)mentioning

confidence: 99%

Section: Figure 21 Glancing Angle Deposition (Glad) (A)mentioning

confidence: 99%

“…[ 135 ] The four archetypal structures of GLAD. (a-c) Reproduced with permission, [ 135 ] copyright 2011 RSC. (b) Inclined pillars (MgF 2 ), [ 27 ] (c) zigzag pillars (MgF 2 ), [ 27 ] (d) helical pillars (MgF 2 ), [ 12 ] and (e) straight pillars (Si).…”

Section: Figure 21 Glancing Angle Deposition (Glad) (A)mentioning

confidence: 99%

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Engineering of Micro‐ and Nanostructured Surfaces with Anisotropic Geometries and Properties

Tawfick¹,

Volder²,

Copic³

et al. 2012

Advanced Materials

216

179

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Widespread approaches to fabricate surfaces with robust micro- and nanostructured topographies have been stimulated by opportunities to enhance interface performance by combining physical and chemical effects. In particular, arrays of asymmetric surface features, such as arrays of grooves, inclined pillars, and helical protrusions, have been shown to impart unique anisotropy in properties including wetting, adhesion, thermal and/or electrical conductivity, optical activity, and capability to direct cell growth. These properties are of wide interest for applications including energy conversion, microelectronics, chemical and biological sensing, and bioengineering. However, fabrication of asymmetric surface features often pushes the limits of traditional etching and deposition techniques, making it challenging to produce the desired surfaces in a scalable and cost-effective manner. We review and classify approaches to fabricate arrays of asymmetric 2D and 3D surface features, in polymers, metals, and ceramics. Analytical and empirical relationships among geometries, materials, and surface properties are discussed, especially in the context of the applications mentioned above. Further, opportunities for new fabrication methods that combine lithography with principles of self-assembly are identified, aiming to establish design principles for fabrication of arbitrary 3D surface textures over large areas.

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Section: Glancing Angle Depositionmentioning

confidence: 98%