2008
DOI: 10.1016/j.microrel.2008.06.020
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Advanced thermal failure analysis and reliability investigations – Industrial demands and related limitations

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Cited by 6 publications
(5 citation statements)
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“…The resistive thermal probe of the SThM is powered by an AC current I 0 sin(ut) with angular frequency u. As demonstrated earlier, 28,29 the probe can be considered in far-eld as a point like heat source and in close proximity as a line-shaped nanoscale heat source fullling the demands for high resolution near-eld microscopy 30 by generating a heat wave of frequency 2u with cylindrical symmetry. This wave will diffuse into the substrate and is exponentially damped in the radial direction.…”
Section: Methodsmentioning
confidence: 99%
“…The resistive thermal probe of the SThM is powered by an AC current I 0 sin(ut) with angular frequency u. As demonstrated earlier, 28,29 the probe can be considered in far-eld as a point like heat source and in close proximity as a line-shaped nanoscale heat source fullling the demands for high resolution near-eld microscopy 30 by generating a heat wave of frequency 2u with cylindrical symmetry. This wave will diffuse into the substrate and is exponentially damped in the radial direction.…”
Section: Methodsmentioning
confidence: 99%
“…In digital CMOS circuits for instance, the location of hot spots (devices operating with an abnormally high temperature) is usually correlated with the presence of a defect that may alter the functionality and performance of the circuit [14]. The temperature-based characterization strategy presents several advantages over other techniques: it provides an indirect way to observe the device's behavior without affecting its electrical characteristics because temperature sensors are electrically isolated from the CUT.…”
Section: Introductionmentioning
confidence: 99%
“…Temperature is a physical magnitude that is measured in integrated circuits (ICs) to extract information about the state and performance of operating devices via thermal mapping of the silicon surface, which is enabled by the linear dependence of the local temperature on the power dissipated by nearby devices. In digital CMOS circuits for instance, the location of hot spots (devices operating with an abnormally high temperature) is usually correlated with the presence of a defect that may alter the functionality and performance of the circuit [14]. The temperature-based characterization strategy presents several advantages over other techniques: it provides an indirect way to observe the device's behavior without affecting its electrical characteristics because temperature sensors are electrically isolated from the CUT.…”
Section: Introductionmentioning
confidence: 99%
“…Recently, the complementarity of the methods for localisation and characterisation as well as the according industrial demands and related limitations have been shown [17]; techniques such as IR-LIT and thermal induced voltage alteration (TIVA), case studies and the capability of non-established techniques like scanning thermal microscopy (SThM), thermal reflectance microscopy (TRM) and time domain thermal reflectance (TDTR) are also presented and their impact on reliability investigations is discussed. It allows different kinds of thermal interaction mechanism to be utilised, which would normally have to be separated-for instance into classes with respect to thermal excitation and/or detection, spatial limitations and underlying physical principle.…”
Section: Techniques Of Failure Analysismentioning
confidence: 99%