Advances in CO2-Laser Drilling of Glass Substrates

Brusberg, Lars; Queisser, Marco; Gentsch, Clemens; Schröder, Henning; Lang, Klaus‐Dieter

doi:10.1016/j.phpro.2012.10.072

Cited by 45 publications

(20 citation statements)

References 2 publications

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“…There is no upper limit in achievable hole sizes and a typical roughness value, R a , is around 1 μm. Machining speed per hole differs from 30 μm/s [ 48 ] up to 2000 μm/s [ 13 ] depending on laser type and desired quality.…”

Section: Common Glass Micro-drilling Techniquesmentioning

confidence: 99%

“…This causes a thermal impact on the glass and generates mechanical stress, which leads to crack formation during cooling. Many solutions are investigated to reduce this phenomenon, like local preheating of the workpiece, heating of the entire workpiece during drilling and thermal post-treatment of the drilled substrate using an oven [ 13 , 25 , 51 , 62 ]. In fact, smooth surfaces ( R a ~ several microns) are possible to achieve due to the generated heat [ 63 ].…”

Section: Common Glass Micro-drilling Techniquesmentioning

confidence: 99%

“…Recently, drilling high density through glass vias (TGVs) became more important for the development of thin (~100 μm) glass interposers in new 2.5D and 3D chip package strategies, due to the demand for higher functionality in small consumer electronics [ 4 , 5 ]. These, often metalized, TGVs (diameters: 10 to 50 μm, depths: up to 100 μm) are used to connect traces and pads on the top and bottom surfaces of the glass interposers [ 4 , 5 , 13 , 14 ].…”

Section: Introductionmentioning

confidence: 99%

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Micro-Hole Drilling on Glass Substrates—A Review

Hof

Ziki

2017

Micromachines

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Glass micromachining is currently becoming essential for the fabrication of micro-devices, including micro- optical-electro-mechanical-systems (MOEMS), miniaturized total analysis systems (μTAS) and microfluidic devices for biosensing. Moreover, glass is radio frequency (RF) transparent, making it an excellent material for sensor and energy transmission devices. Advancements are constantly being made in this field, yet machining smooth through-glass vias (TGVs) with high aspect ratio remains challenging due to poor glass machinability. As TGVs are required for several micro-devices, intensive research is being carried out on numerous glass micromachining technologies. This paper reviews established and emerging technologies for glass micro-hole drilling, describing their principles of operation and characteristics, and their advantages and disadvantages. These technologies are sorted into four machining categories: mechanical, thermal, chemical, and hybrid machining (which combines several machining methods). Achieved features by these methods are summarized in a table and presented in two graphs. We believe that this paper will be a valuable resource for researchers working in the field of glass micromachining as it provides a comprehensive review of the different glass micromachining technologies. It will be a useful guide for advancing these techniques and establishing new hybrid ones, especially since this is the first broad review in this field.

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Section: Common Glass Micro-drilling Techniquesmentioning

confidence: 99%

Section: Common Glass Micro-drilling Techniquesmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Micro-Hole Drilling on Glass Substrates—A Review

Hof

Ziki

2017

Micromachines

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“…Microchannel engraving has been demonstrated as a rapid fabrication method for microfluidic devices [ 5 , 6 ]. Laser drilling, termed ablation, of a single spot is another conventional technique to generate an array of microstructures, i.e., concavities or through-holes applied in many industrial and research applications [ 7 , 8 ]. Combined with the use of different substrate materials, a wide range of downstream tissue or cellular-based utilities can be readily achieved [ 3 , 9 , 10 , 11 ].…”

Section: Introductionmentioning

confidence: 99%

A Facile Approach for Rapid Prototyping of Microneedle Molds, Microwells and Micro-Through-Holes in Various Substrate Materials Using CO2 Laser Drilling

Chen

et al. 2020

Biomedicines

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CO2 laser manufacturing has served as an enabling and reliable tool for rapid and cost-effective microfabrication over the past few decades. While a wide range of industrial and biological applications have been studied, the choice of materials fabricated across various laser parameters and systems is often confounded by their complex combinations. We herein presented a unified procedure performed using percussion CO2 laser drilling with a range of laser parameters, substrate materials and various generated microstructures, enabling a variety of downstream tissue/cellular-based applications. Emphasis is placed on delineating the laser drilling effect on different biocompatible materials and proof-of-concept utilities. First, a polydimethylsiloxane (PDMS) microneedle (MN) array mold is fabricated to generate dissolvable polyvinylpyrrolidone/polyvinyl alcohol (PVP/PVA) MNs for transdermal drug delivery. Second, polystyrene (PS) microwells are optimized in a compact array for the formation of size-controlled multicellular tumor spheroids (MCTSs). Third, coverglass is perforated to form a microaperture that can be used to trap/position cells/spheroids. Fourth, the creation of through-holes in PS is validated as an accessible method to create channels that facilitate medium exchange in hanging drop arrays and as a conducive tool for the growth and drug screenings of MCTSs.

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“…The primary reason for fabricating a limited number of glass valves in these studies was the difficulty of fabricating hundreds of micro-through-holes in the small area of a thin glass slide. Usually, through-glass through-holes can be produced using deep wet, dry, or deep neutral loop discharge plasma (Deep NLD) etching [ 30 , 31 , 32 ], blasting [ 33 , 34 ] laser drilling [ 35 ], electrochemical discharge [ 36 , 37 ], and mechanical drilling [ 38 ]. Most of these methods, however, are risky, difficult, and inefficient to use for the fabrication of a large number of micro-through-holes on a single glass slide.…”

Section: Introductionmentioning

confidence: 99%

Large-Scale Integration of All-Glass Valves on a Microfluidic Device

Yalikun¹,

Tanaka²

2016

Micromachines

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In this study, we developed a method for fabricating a microfluidic device with integrated large-scale all-glass valves and constructed an actuator system to control each of the valves on the device. Such a microfluidic device has advantages that allow its use in various fields, including physical, chemical, and biochemical analyses and syntheses. However, it is inefficient and difficult to integrate the large-scale all-glass valves in a microfluidic device using conventional glass fabrication methods, especially for the through-hole fabrication step. Therefore, we have developed a fabrication method for the large-scale integration of all-glass valves in a microfluidic device that contains 110 individually controllable diaphragm valve units on a 30 mm × 70 mm glass slide. This prototype device was fabricated by first sandwiching a 0.4-mm-thick glass slide that contained 110 1.5-mm-diameter shallow chambers, each with two 50-μm-diameter through-holes, between an ultra-thin glass sheet (4 μm thick) and another 0.7-mm-thick glass slide that contained etched channels. After the fusion bonding of these three layers, the large-scale microfluidic device was obtained with integrated all-glass valves consisting of 110 individual diaphragm valve units. We demonstrated its use as a pump capable of generating a flow rate of approximately 0.06–5.33 μL/min. The maximum frequency of flow switching was approximately 12 Hz.

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Advances in CO2-Laser Drilling of Glass Substrates

Cited by 45 publications

References 2 publications

Micro-Hole Drilling on Glass Substrates—A Review

Micro-Hole Drilling on Glass Substrates—A Review

A Facile Approach for Rapid Prototyping of Microneedle Molds, Microwells and Micro-Through-Holes in Various Substrate Materials Using CO2 Laser Drilling

Large-Scale Integration of All-Glass Valves on a Microfluidic Device

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