Aerosol Assisted Chemical Vapor Deposition of In₂O₃ Films from Me₃In and Donor Functionalized Alcohols

Abstract

The reaction of Me3In and ROH (R = CH2CH2NMe2, CH(CH3)CH2NMe2, C(CH3)2CH2OMe, CH2CH2OMe) in toluene under aerosol assisted chemical vapor deposition (AACVD) conditions leads to the production of indium oxide thin films on glass. The indium oxide films were deposited at 550 degrees C and analyzed by scanning electron microscopy (SEM), X-ray powder diffraction, wavelength dispersive analysis of X-rays (WDX), X-ray photoelectron spectroscopy (XPS), and Raman spectroscopy. This CVD technique offers a rapid, convenient route to In2O3, which presumably involves the in situ formation of dimethylindium alkoxides, of the type [Me2InOR]2. In order to identify compounds present in the aerosol mist, the solution-phase reaction between Me3In and ROH (R = CH2CH2NMe2, C(CH3)2CH2OMe, CH(CH3)CH2NMe2, CH(CH2NMe2)2) at room temperature in toluene was carried out. Dimeric indium alkoxides, of the type [Me2In(OR)]2, were isolated, and their structures were determined by X-ray crystallography.

High Performance, Low Temperature Solution-Processed Barium and Strontium Doped Oxide Thin Film Transistors

“…The overall observed lower mobility for these devices as shown in Figure 5, in comparison with that when using the indium pentacluster derivative 11 ( 1 ) (Figure 2), can be attributed to the reported higher degradation temperatures for the simple alkyl indium alkoxides ([R 3– x In(OR′) x ]) 48 ( 5 , 6 ) than the temperatures for the cluster compound, In 5 O(OCH(CH 3 ) 2 ) 13 ( 1 ).…”

Syntheses, X-ray structures and CVD studies of diorganoalkoxogallanes

“…Thus, the 1 H NMR of 4 only has one sharp singlet for the two distinct NMe 2 groups. In the related indium complex [Me 2 In(OCH(CH 2 NMe 2 ) 2 )] 2 incorporating the same aminoalkoxide ligand, the indium atom is six-coordinate since both NMe 2 groups coordinate to the larger indium atom [19]. Some related methylalkoxogallanes, such as [Me 2 Ga(OCH 2 CH(R)NMe 2 )] 2 (R = i Pr, Bz, Et) have been previously reported with comparable bond lengths and angles to 1-4 [26][27][28].…”

“…We have recently been investigating the synthesis of gallium [18] and indium [19] alkoxides [20] incorporating donor-functionalized ligands. These ligands were chosen for CVD, as they lead to precursors, which are less air/moisture sensitive and have increased solubility [21].…”

Diorgano-gallium and -indium complexes with salen ligands: Synthesis, characterization, crystal structure and C–C coupling reactions

“…The structural preferences in these complexes are governed by the nature of R, M and L [13][14][15][16][17][18][19][20][21][22][23][24][25]. Recently we have described the synthesis of diorgano-gallium/-indium complexes containing internally functionalized anionic oxo ligands [9,10,26,27].…”