Al2O3-coated microcantilevers for detection of moisture at ppm level

High temperature humidity sensors based on sputtered Y-doped BaZrO3 thin films

“…Many examples of humidity sensor based on chemisorption (surface adsorption) of H 2 O or water vapor have been reported [8][9][10][11], but often lack selectivity towards to NO x , and O 2 [12][13][14][15]. Surface/chemisorption based mechanisms respond to almost all species present in the gas atmosphere.…”

A micro interdigitated thin film metal oxide capacitive sensor for measuring moisture in the range of 175–625 ppm

“…To obtain a low cost sensor for trace level moisture measurement, several works utilizing sol-gel aluminum oxide thin film have been recently reported in literature [15][16][17][18][19]. The salient response characteristics of the aluminum oxide sensors available in commercial dew point meters and in literature are given in Table 1.…”

“…Most of the sensors employ parallel plate capacitive structure with costly gold electrode. From the table we observed that most of the parallel plate capacitive sensors have high response and recovery time [10][11][12][15][16][17][18], high hysteresis [12,13] and there is no data for yield ratio. A very fast and long term stable alumina moisture sensor has been reported in [2] but the device has very small sensitivity from 0 to 1000 ppm moisture and there is no data about the yield ratio.…”

Piezoresistive microcantilever aptasensor for ricin detection and kinetic analysis

“…[1][2][3][4][5][6] A piezoresistive microcantilever is a new kind of electrical cantilever, with characteristics of simple read-out way, easy integration, low cost, and small volume. Compared with an optical readout and dynamic-mode cantilever, it is more promising in field detection.…”