The properties and low pressure organometallic vapor phase epitaxy of GaIn1..P/(AIGa)o.5Ino.5P quantum well (QW) laser diode heterostructures with Al05ln0.5P cladding layers, and having wavelength 614660 nm), threshold current densities under 200 A/cm2 and efficiencies greater than 75% result from a biaxially-compressed GalnP QW active region. Although short wavelength laser performance is diminished by the poor electron confinement afforded by AlGalnP heterostructures, good 630 nm band performance is achieved with strained, single QW active regions. The wavelength range may also be expanded into the previously difficult 700-nm band, by including lnGaAsP or AIGaAsP QWs.
INTRODUCTiON(AlGa)0.5ln0,5P is a high-bandgap Ill-V alloy that is lattice-matched to GaAs substrates, and which is used in 600 nm band laser diodes and LEDs. Continuous-wave (cw), roomtemperature AIGalnP double heterostructure (DH) lasers were first demonstrated in 1 985, at the Japanese Laboratories of NEC, Sony, and Toshiba. More recently, quantum well (QW) heterostructures have led to greatly reduced threshold current densities, especially for strained QWs. Indeed, in many respects the performance of 680 nm AlGalnP lasers now matches that of AIGaAs laser diodes. Extending the operation of AlGalnP lasers to short wavelengths (A<640 nm) is difficult, however, because ofthe relatively weak electron confinement afforded by (AIGa)o.slno.5P heterostructures [1-9]. The beneficial effects of biaxial strain (both compressive and tensile) have led to a sizeable reduction in the threshold current of 600-nm band AIGalnP QW laser diodes [7-9]. Consequently, new applications are being addressed, for example those requiring shorter wavelengths or very high power.
PROPERTIES OF (AlGa)o.5lno.5PThe bandgap of (AIXGa1.X)o.51n0.5P is direct for and ranges from 1 .9 eV (for Gao.51n0.5P) to about 2.3 eV (for [Alo.7Gao.3]o.5lno.5P). For x>0.7, the bandgap is indirect and increases very slowly with composition, to about 2.35 eV for Al05ln05P. Compared to AIGaAs, other disting uishing properties of (AIGa)o.5lno.5P heterostructures are difficulties with p-doping, very low hole mobility, and high thermal resistivity. The carrier effective masses are also greater in AlGälnP than in AIGaAs. This translates into a greater density of carrier states, and therefore higher carrier concentrations at threshold.In lattice-matched Gao.5Ino.5P/(AlGal.)o.5lno.5P heterostructures, the direct (1) bandgap energy difference is split between the conduction band offset (E) and the valence band offset (E) in the ratio LiE/1XE=65/35 [101. The conduction band offset increases with the 236 ISPIE Vol. 2380 0-8194-1727-0/95/$6.00 Downloaded From: http://proceedings.spiedigitallibrary.org/ on 06/23/2016 Terms of Use: http://spiedigitallibrary.org/ss/TermsOfUse.aspx