2007
DOI: 10.1088/0957-4484/19/02/025304
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Aligned nanowire growth using lithography-assisted bonding of a polycarbonate template for neural probe electrodes

Abstract: This research presents a fabrication method of vertically aligned nanowires on substrates using lithography-assisted template bonding (LATB) towards developing highly efficient electrodes for biomedical applications at low cost. A polycarbonate template containing cylindrical nanopores is attached to a substrate and the nanopores are selectively opened with a modified lithography process. Vertically aligned nanowires are grown by electrochemical deposition through these open pores on polyimide film and silicon… Show more

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Cited by 43 publications
(40 citation statements)
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“…These aligned NW arrays can be fabricated using electrodeposition into sacrificial porous membranes, [11][12][13] which is an inexpensive, scalable, and tunable method to rapidly and controllably synthesize vertically-aligned metal NWs over large areas. The porous membranes, which are commonly either anodized aluminum oxide (AAO) 11,[14][15][16][17][18][19][20][21][22][23][24][25][26] or polycarbonate track-etched (PCTE) membranes, 12,[27][28][29][30][31][32][33][34][35][36][37][38][39][40][41] are used as templates to confine metal deposition to the cylindrical pores, after which the membrane is dissolved. Many arrayscale properties (e.g.…”
Section: Introductionmentioning
confidence: 99%
“…These aligned NW arrays can be fabricated using electrodeposition into sacrificial porous membranes, [11][12][13] which is an inexpensive, scalable, and tunable method to rapidly and controllably synthesize vertically-aligned metal NWs over large areas. The porous membranes, which are commonly either anodized aluminum oxide (AAO) 11,[14][15][16][17][18][19][20][21][22][23][24][25][26] or polycarbonate track-etched (PCTE) membranes, 12,[27][28][29][30][31][32][33][34][35][36][37][38][39][40][41] are used as templates to confine metal deposition to the cylindrical pores, after which the membrane is dissolved. Many arrayscale properties (e.g.…”
Section: Introductionmentioning
confidence: 99%
“…The vertically aligned nanowires were fabricated using a hybrid assembly method of nanopore membrane and electrochemical deposition processes on a silicon substrate, details are explained further in [15,16]. First, a 2 mm insulating layer of SiO 2 was deposited on 125 mm, (111) Si wafers.…”
Section: Methodsmentioning
confidence: 99%
“…In the nanowire electrode design for neural sensing in [9][10][11], the distance between the nanowires was assumed to be 400 nm and the depth of the channels has the value of 1 µm in this study. For nanogrid electrode simulation, the gap between the sensing core and the shielding grid structures was set as 100 nm.…”
Section: Simulationmentioning
confidence: 99%
“…Here, an electrochemical molecular diffusion analysis using 2-dimensional finite element modeling is studied in relation with the electrode impedance property of nanoelectrodes. The analysis is based on our previous development of neural sensing electrodes using vertically aligned nanowires [9][10][11].…”
Section: Introductionmentioning
confidence: 99%