All amorphous SiC based luminescent microcavity

Xu, Jun; Mei, Jiaxin; Chen, D.; Chen, S.; Li, W.; Chen, K.

doi:10.1016/j.diamond.2005.08.005

Cited by 6 publications

(1 citation statement)

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“…The multiband PL spectra indicate that the recombination process occurs through the localized states in the a-SiC:H structure. 4) A previous study 11) revealed that increasing the carbon content in the a-SiC:H films may result in the formation of methyl configurations, thus increasing the number of microvoids and defect states and, in turn, deteriorating the optoelectronic properties of the films. a-SiC:H films deposited on c-Si with a high gas flow rate ratio (R ¼ 20) show low PL intensity with the peak blue shifted as shown in Fig.…”

Section: Resultsmentioning

confidence: 99%

Optical Characteristics of Hydrogenated Amorphous Silicon Carbide Films Prepared at Various Gas Flow Rate Ratios

Azis¹,

Rahman

2007

jjap

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Hydrogenated amorphous silicon carbide (a-SiC:H) films were prepared using a home-built plasma-enhanced chemical vapor deposition (PECVD) system with different flow rate ratios of methane (CH 4 ) and silane (SiH 4 ) gases. Fourier-transform infrared (FTIR) spectra indicate multiple bonding configurations consisting of wagging, bending and stretching modes of silicon, hydrogen and carbon atoms with a steady depletion of Si-H wagging and stretching modes as the gas flow rate ratio increases. Micro-Raman spectra show evidence of amorphous silicon structure in all the films. Only the a-SiC:H film prepared at the highest CH 4 to SiH 4 gas flow rate ratio shows the existence of the Si-C vibrational mode. All the samples prepared show room-temperature luminescence with two peaks centered at 467 and 698 nm. The photoluminescence (PL) intensity increases as the CH 4 to SiH 4 gas flow rate ratio increases but a reduction in intensity is observed for a high CH 4 to SiH 4 gas flow rate ratio. a-SiC:H films with higher optical energy gaps were obtained by allowing the gases to flow at higher CH 4 to SiH 4 gas flow rate ratios.

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Section: Resultsmentioning

confidence: 99%