AlN Lamb Wave Resonators on a Flexible Substrate

Yang, Xing; Liang, Ji; Jiang, Yuan; Chen, Xuejiao; Zhang, Hao; Zhang, Menglun

doi:10.1109/led.2017.2714708

Cited by 17 publications

(8 citation statements)

References 15 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…In comparison to the above semiconductors that have been released in the form of NMs, single-crystalline aluminum nitride (AlN) has the unique properties of ultrawide direct bandgap (6.2 eV), [36] high breakdown electric field (15.4 MV cm −1 ), [37] good thermal conductivity (3.19 W cm −1 K −1 ), [38] strong spontaneous polarization, and good piezoelectricity. These properties enable AlN for applications in ultraviolet wavelength sensing, [39,40] power electronics, [41,42] piezoelectric devices, [43][44][45][46][47][48] etc. Furthermore, the polarization properties of single-crystalline AlN can induce free charges at the heterointerface and influence mobile carrier distributions via polarization-induced bound charges, an approach which is expected to be much more effective than doping via impurities.…”

Section: Introductionmentioning

confidence: 99%

Synthesis and Characteristics of Transferrable Single‐Crystalline AlN Nanomembranes

Gong

Jie

Wang

et al. 2023

Adv Elect Materials

View full text Add to dashboard Cite

Single‐crystalline inorganic semiconductor nanomembranes (NMs) have attracted great attention over the last decade, which poses great advantages to complex device integration. Applications in heterogeneous electronics and flexible electronics have been demonstrated with various semiconductor nanomembranes. Single‐crystalline aluminum nitride (AlN), as an ultrawide‐bandgap semiconductor with great potential in applications such as high‐power electronics has not been demonstrated in its NM forms. This very first report demonstrates the creation, transfer‐printing, and characteristics of the high‐quality single‐crystalline AlN NMs. This work successfully transfers the AlN NMs onto various foreign substrates. The crystalline quality of the NMs has been characterized by a broad range of techniques before and after the transfer‐printing and no degradation in crystal quality has been observed. Interestingly, a partial relaxation of the tensile stress has been observed when comparing the original as‐grown AlN epi and the transferred AlN NMs. In addition, the transferred AlN NMs exhibits the presence of piezoelectricity at the nanoscale, as confirmed by piezoelectric force microscopy. This work also comments on the advantages and the challenges of the approach. Potentially, the novel approach opens a viable path for the development of the AlN‐based heterogeneous integration and future novel electronics and optoelectronics.

show abstract

Section: Introductionmentioning

confidence: 99%

Synthesis and Characteristics of Transferrable Single‐Crystalline AlN Nanomembranes

Gong

Jie

Wang

et al. 2023

Adv Elect Materials

View full text Add to dashboard Cite

show abstract

“…With these integrated functional components, the chip can scale up with thousands of on-chip sensors and more sophisticated DMF design to fulfill more complex tasks, thanks to the IC-compatible fabrication of the solid-state chip. Furthermore, the chip could be potentially developed into a flexible form to build a wearable system for in situ health monitoring. − …”

Section: Conclusion and Outlookmentioning

confidence: 88%

Solid-State Microfluidics with Integrated Thin-Film Acoustic Sensors

Zhang

Huang

et al. 2018

ACS Sens.

Self Cite

View full text Add to dashboard Cite

For point-of-care applications, integrating sensors into a microfluidic chip is a nontrivial task because conventional detection modules are bulky and microfluidic chips are small in size and their fabrication processes are not compatible. In this work, a solid-state microfluidic chip with on-chip acoustic sensors using standard thin-film technologies is introduced. The integrated chip is essentially a stack of thin films on silicon substrate, featuring compact size, electrical input (fluid control), and electrical output (sensor read-out). These features all contribute to portability. In addition, by virtue of processing discrete microdroplets, the chip provides a solution to the performance degradation bottleneck of acoustic sensors in liquid-phase sensing. Label-free immunoassays in serum are carried out, and the viability of the chip is further demonstrated by result comparison with commercial ELISA in prostate-specific antigen sensing experiments. The solid-state chip is believed to fit specific applications in personalized diagnostics and other relevant clinical settings where instrument portability matters.

show abstract

“…Flexible and wireless sensors have attracted profound interest owing to their widespread applications in healthcare, [1][2][3] wearable Extensive studies have been done for flexible acoustic wave devices used in various fields such as sensing (temperature, [21] humidity, [22] UV, [23] biosensing, [20,24] strain, [25][26][27][28] and pH), [29] acoustofluidics, [30] and flexible RF filter/oscillator. [17] Depending on the structural designs, piezoelectric devices with different vibration modes have been fabricated, e.g., surface acoustic wave (SAW) devices, [31] Lamb wave devices, [32] and film bulk acoustic resonators (FBAR). [33] However, most of these studies are focused more on achieving their inherent flexibility.…”

Section: Introductionmentioning

confidence: 99%

Multifunctional and Wearable Patches Based on Flexible Piezoelectric Acoustics for Integrated Sensing, Localization, and Underwater Communication

Zhang

Wang

et al. 2022

Adv Funct Materials

View full text Add to dashboard Cite

Flexible and wearable sensors are highly desired for health monitoring, agriculture, sport, and indoor positioning systems applications. However, the currently developed wireless wearable sensors, which are communicated through radio signals, can only provide limited positioning accuracy and are often ineffective in underwater conditions. In this paper, a wireless platform based on flexible piezoelectric acoustics is developed with multiple functions of sensing, communication, and positioning. Under a high frequency (≈13 MHz) stimulation, Lamb waves are generated for respiratory monitoring. Whereas under low-frequency stimulation (≈20 kHz), this device is agitated as a vibrating membrane, which can be implemented for communication and positioning applications. Indoor communication is demonstrated within 2.8 m at 200 bps or 4.2 m at 25 bps. In combination with the sensing function, real-time respiratory monitoring and wireless communication are achieved simultaneously. The distance measurement is achieved based on the phase differences of transmitted and received acoustic signals within a range of 100 cm, with a maximum error of 3 cm. This study offers new insights into the communication and positioning applications using flexible acoustic wave devices, which are promising for wireless and wearable sensor networks.

show abstract

AlN Lamb Wave Resonators on a Flexible Substrate

Cited by 17 publications

References 15 publications

Synthesis and Characteristics of Transferrable Single‐Crystalline AlN Nanomembranes

Synthesis and Characteristics of Transferrable Single‐Crystalline AlN Nanomembranes

Solid-State Microfluidics with Integrated Thin-Film Acoustic Sensors

Multifunctional and Wearable Patches Based on Flexible Piezoelectric Acoustics for Integrated Sensing, Localization, and Underwater Communication

Contact Info

Product

Resources

About