AlN PMUT-based Ultrasonic Power Transfer Links for Implantable Electronics

Herrera, Bernard; Pop, Flavius; Cassella, Cristian; Rinaldi, Matteo

doi:10.1109/transducers.2019.8808320

Cited by 37 publications

(15 citation statements)

References 10 publications

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“…PMUT sensors for Time-of-Flight measurement. Piezoelectric micromachined ultrasonic transducers are scalable ultrasound sensors that can be integrated with advanced CMOS technology [31][32][33]47 , and have lower actuating voltage and power consumption than conventional bulk transducers 48 . In our work, the diameter of the membrane is 440µm and the resonance frequency spreads in the range [110 − 117]k Hz (Fig.…”

Section: Resultsmentioning

confidence: 99%

“…Their inherent non-volatility -not requiring active power consumption to store or refresh the information -matches the asynchronous event-driven nature of neuromorphic computation perfectly, resulting in virtually no power consumption when the system is idle. Piezoelectric micromachined ultrasound transducers (pMUTs) are low-cost, miniaturized silicon-based ultrasound sensors able to act as emitters and receivers [30][31][32][33][34] . To process the signals captured by the embedded sensors, we have taken inspiration from the neuroanatomy of the barn owl [35][36][37] .…”

Section: Introductionmentioning

confidence: 99%

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Neuromorphic object localization using resistive memories and ultrasonic transducers

Moro

Hardy

Fain

et al. 2021

Preprint

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Real-world sensory-processing applications require compact, low-latency, and low-power computing systems. Enabled by their in-memory event-driven computing abilities, hybrid memristive-CMOS neuromorphic architectures provide an ideal hardware substrate for such tasks. To demonstrate the full potential of such systems, we propose and experimentally demonstrate an end-to-end sensory processing solution for a real-world object localization application. Drawing inspiration from the barn owl’s neuroanatomy, we developed a bio-mimetic, event-driven object localization system that couples state-of-the-art piezoelectric micromachined ultrasound transducer (pMUT) sensors to a neuromorphic resistive memories-based computational map. We present measurement results from the fabricated system comprising resistive memories-based coincidence detectors, delay line circuits, and a full-custom pMUT sensor. We use these experimental results to calibrate our system-level simulations. These simulations are then used to estimate the angular resolution and energy efficiency of the object localization model. The results reveal the potential of our approach, evaluated in orders of magnitude greater energy efficiency than a microcontroller performing the same task.

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Section: Resultsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Neuromorphic object localization using resistive memories and ultrasonic transducers

Moro

Hardy

Fain

et al. 2021

Preprint

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“…B. Herrera et al presented an AlN based piezo micromachined ultrasonic transducer (PMUT) replacing PZT material for a more biocompatible alternative. However, the reported efficiency was less than a percent [3]. Therefore, further investigation must be done to establish a biocompatible, highly efficient ultrasound transducer technology that can be monolithically integrated with an ASIC for the next generation of miniature IMDs.…”

Section: Introductionmentioning

confidence: 99%

Pre-charged collapse-mode capacitive micromachined ultrasonic transducer (CMUT) for broadband ultrasound power transfer

Kawasaki

Westhoek

Subramaniam

et al. 2021

2021 IEEE Wireless Power Transfer Conference (WPTC)

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“…P IEZOELECTRIC micro-machined ultrasonic transducers (PMUTs) are a foundational technology for numerous applications, ranging from the conventional ultrasonic medical imaging [1], [2] and the emerging wireless communication [3], [4], to powering [5], [6], fingerprint sensing [7], gesture recognition [8], flow sensing [9], and indoor occupancy sensing [10]. The rising popularity of PMUTs is primarily catalyzed by the advances in piezoelectric thin film materials, such as reactively sputtered AlN/ScAlN [11] or PZT [12] variants.…”

Section: Introductionmentioning

confidence: 99%

A Piezoelectric Micromachined Ultrasonic Transducer Using Thin-Film Lithium Niobate

Breen

Hassanien

et al. 2020

J. Microelectromech. Syst.

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This letter presents the first piezoelectric micromachined ultrasonic transducer (PMUT) based on thin-film lithium niobate (LiNbO 3). The figures of merit (FoMs) of LiNbO 3 as ultrasound sensors and transducers are first studied, showing great prospective as a balanced transceiver platform. Efficient flexural mode excitation is achieved using a proposed lateral-field-excitation (LFE) structure. The implemented device shows a flexural mode at 7.6 MHz, with a high electromechanical coupling (k 2) of 4.2%. Measured quality factor (Q) in vacuum is 2605, indicating the low structural loss, while measured Q in air is 264, suggesting the ultrasound radiation. A dynamic displacement sensitivity of 20.2 nm/V is measured. Upon further optimizations, LiNbO 3based PMUTs are promising candidates for miniature ultrasound applications.

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AlN PMUT-based Ultrasonic Power Transfer Links for Implantable Electronics

Cited by 37 publications

References 10 publications

Neuromorphic object localization using resistive memories and ultrasonic transducers

Neuromorphic object localization using resistive memories and ultrasonic transducers

Pre-charged collapse-mode capacitive micromachined ultrasonic transducer (CMUT) for broadband ultrasound power transfer

A Piezoelectric Micromachined Ultrasonic Transducer Using Thin-Film Lithium Niobate

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