Aluminum Conductor Line Corrosion

Bhide, V. S.; Eldridge, J. M.

doi:10.1109/irps.1983.361960

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P205 Concentration In Phosphosilicate Glass (Psg)--1

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1989

1997

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Cited by 4 publications

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“…Paulson and Lorigan (3) suggest the corrosion rate increases with temperature. Several studies indicate this dependence has the form b log (MTF) --a + u [2] where b = Q/k In 10 and Q is the activation energy.…”

Section: P205 Concentration In Phosphosilicate Glass (Psg)--mentioning

confidence: 99%

Effects of Several Parameters on the Corrosion Rates of Al Conductors in Integrated Circuits

Lerner¹,

Eldridge²

1982

J. Electrochem. Soc.

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This paper briefly reviews literature on the effects of major materials and testing parameters on the corrosion rates of Al conductor lines in contact with phosphosilicate glass layers in integrated circuits. In an effort to assess the relative importance of these parameters on Al corrosion, selected literature findings are combined into a generalized rate equation that can be used to estimate Al conductor lifetimes under a wide range of conditions and to guide in the development of future experiments to address this highly complex problem more precisely. Al corrosion mechanisms and polarity effects are also briefly discussed.

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Section: P205 Concentration In Phosphosilicate Glass (Psg)--mentioning

confidence: 99%