Amorphous silicon carbonitride diaphragm for environmental-cell transmission electron microscope fabricated by low-energy ion beam induced chemical vapor deposition

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Amorphous silicon carbonitride diaphragm for environmental-cell transmission electron microscope fabricated by low-energy ion beam induced chemical vapor deposition

Cited by 4 publications

References 15 publications

Organosilicon compounds as single-source precursors for SiCN films production

Organosilicon compounds as single-source precursors for SiCN films production

Surface modification of triacetylcellulose by low-energy nitrogen ions for diaphragm of environmental cell transmission electron microscope

Reprint of "Surface modification of triacetylcellulose by low-energy nitrogen ions for diaphragm of environmental cell transmission electron microscope"

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