Organosilicon compounds as single-source precursors for SiCN films production

Enhanced Wettability, Hardness, and Tunable Optical Properties of SiCxNy Coatings Formed by Reactive Magnetron Sputtering

“…The introduction of N 2 into the gas mixture leads to an increase in the nitrogen content of the SiC x N y films of up to 40 at.% [ 9 ]. A similar effect of the addition of nitrogen-containing gas on the composition of SiC x N y films is also shown for CVD films [ 1 ]. As follows from the literature, most of the films were obtained at room temperature (RT).…”

“…The addition of even an insignificant amount of nitrogen to the gas phase (F(N 2 ) = 2 sccm) leads to a shift of the baseband to the region of large wave numbers and to its broadening, which corresponds to the appearance of bonds between silicon and nitrogen. The observed wide absorption band in the range of 700–1200 cm −1 is the typical one for Si–C–N films [ 1 ]. It can be interpreted as the superposition of bonds such as Si–C, Si–N, C–N, and Si–O.…”

“…The bands at 790 and 950 cm −1 correspond to Si–C and Si–N stretching vibrations, respectively [ 52 ]. Absorptions in the regions of 1055–1400 cm –1 and 1020–1100 cm –1 are attributed to the vibration of the C–N and Si–O bonds, respectively [ 1 ]. A further increase in the nitrogen flow rate causes the appearance in the FTIR spectra and the increase in the intensity of the peaks at 1550–1600 and 2200 cm –1 .…”

“…Owing to their multifaceted properties, silicon carbonitrides SiC x N y [ 1 , 2 , 3 ] are modern multifunctional materials with a wide range of applications. SiC x N y exhibits a combination of tribo-mechanical (high hardness [ 4 , 5 , 6 , 7 , 8 , 9 , 10 , 11 , 12 , 13 , 14 , 15 , 16 , 17 ], wear resistance [ 6 , 7 ], low coefficient of friction [ 6 ], high adhesion to construction materials [ 6 ]), chemical (high thermal and corrosion resistance [ 1 , 7 , 10 ]), and physical (low dielectric constant [ 1 ], controlled in a wide range of values of refractive index [ 18 ] and optical band gap [ 18 , 19 , 20 , 21 ], high optical transparency in a wide spectral range [ 19 , 21 , 22 , 23 ], high hydrophobicity [ 24 ]) properties. Due to the variable composition of the compound, it is possible to change the values of the conductivity, the hardness, and Young’s modulus.…”

“…This explains the continuing relevance of multifaceted studies of film deposition processes after more than forty years. SiC x N y film and coating synthetic routes are based on both chemical and physical deposition methods [ 1 , 3 ]. Among the physical methods, magnetron sputtering (MS) is the most frequently used technique, and its various types include radio frequency (RF) sputtering, direct current (DC) sputtering, and high-power impulse magnetron sputtering (HiPIMS).…”