2001
DOI: 10.1016/s0961-1290(01)80530-5
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An 80 GHz SiGe production technology

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Cited by 46 publications
(30 citation statements)
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“…For realizing the PLL circuit, we used an SiGe HBT technology [10] from Telefunken Semiconductors GmbH. The process requires only 22 masks with 0.8-m minimum feature size, and therefore, is very cost effective.…”
Section: Technology Overviewmentioning
confidence: 99%
“…For realizing the PLL circuit, we used an SiGe HBT technology [10] from Telefunken Semiconductors GmbH. The process requires only 22 masks with 0.8-m minimum feature size, and therefore, is very cost effective.…”
Section: Technology Overviewmentioning
confidence: 99%
“…Finally, several on-chip DC-block capacitors are used to separate the operating points of the upper-quad and lower-pair transistors, and in order to separate the DC-operating points of preceding and following stages. The frequency quadrupler chip is fabricated using Telefunken SiGe2RF technology [14]. SiGe2RF is a low cost Si/SiGe HBT process with a minumum effective emitter size of 0.5 x 1.1 µm 2 .…”
Section: The Circuit Descriptionmentioning
confidence: 99%
“…The technology used in this work is the Si/SiGe HBT process commercially available from Atmel GmbH (Germany) [3]. It is a 0.8 µm technology with a minimum effective emitter size of 0.5 x 1.1 µm 2 .…”
Section: Technology Overviewmentioning
confidence: 99%