1993
DOI: 10.1109/22.231646
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An 86-106 GHz quasi-integrated low noise Schottky receiver

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Cited by 42 publications
(15 citation statements)
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“…Micromachining has therefore been used to suspend dipole or slot radiators on thin dielectric membranes (without the shielding cavities described in previous filters), with the planar antennas then effectively radiating in free space. Anisotropic etching has also been used to integrate silicon pyramidal cavities that act as miniature integrated horns around the dipole antennas, directing the radiated energy very efficiently in the forward direction [51,52].…”
Section: Micromachined Antennas and Synthesized Substratesmentioning
confidence: 99%
“…Micromachining has therefore been used to suspend dipole or slot radiators on thin dielectric membranes (without the shielding cavities described in previous filters), with the planar antennas then effectively radiating in free space. Anisotropic etching has also been used to integrate silicon pyramidal cavities that act as miniature integrated horns around the dipole antennas, directing the radiated energy very efficiently in the forward direction [51,52].…”
Section: Micromachined Antennas and Synthesized Substratesmentioning
confidence: 99%
“…the "Attenuator procedure" [3]- [6], the "Gain procedure" [7]- [8] and the "Noise injection procedure" [9]- [10]. …”
Section: Introductionmentioning
confidence: 99%
“…There are three kinds of micromachined patch antenna structures reported. One is a micromachined patch antenna supported with a thin membrane by complete or partial etching the substrate underneath and around the antenna [2]- [4]. The second one is a micromachined patch antenna by etching or drilling a series of very closely spaced holes ( 10 d λ ≤ ) underneath and around the antenna [5].…”
Section: Introductionmentioning
confidence: 99%