2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS) 2019
DOI: 10.1109/memsys.2019.8870705
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An 8PPM/°C Temperature Sensitivity of the Scale Factor in MEMS Gyroscope Based on Multi Parameters Fusion Compensation Method

Jian Cui
1
,
Qiancheng Zhao
2
,
Zesen Bai
3
et al.
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