An active slider for practical contact recording

Yeack-Scranton, C.E.; Etzold, Konstantin; Khanna, Vivek; Praino, A. P.

doi:10.1109/20.104770

Cited by 69 publications

(21 citation statements)

References 3 publications

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“…Some active-head sliders with a piezoelectric actuator have been proposed. Yeack-Scranton et al (1990) proposed a novel concept for an active-head slider and succeeded in experimentally controlling the head/disk spacing. Their active-head slider had bulk stacked leadzirconate-titanate (PZT) in the grooves fabricated on the surface opposite the ABS.…”

Section: Objectivementioning

confidence: 99%

Active-head slider with piezoelectric actuator using shear-mode deformation

et al. 2009

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The active-head slider technology for hard disk drive is one of the most promising means to decrease flying height. This paper describes a piezoelectric flying height control slider which has a faster dynamic response compared with conventional active-head sliders. This slider can be also adapted to the conventional slider-fabrication process. PZT layer located near the magnetic head has shear mode deformation by applying electric voltage between the upper and lower electrodes when the flying height of magnetic head needs to be decreased or increased. We fabricated a prototype with single crystal Si substrate for feasibility study. Our evaluation of the prototype revealed that the piezoelectric constant of the shear mode deformation was 0.88 nm/V, and the dynamic response was 50 kHz. The shape of the air bearing surface was optimized by simulations using a robust design method. We found that the stroke was 8 nm for an applied voltage of 11 V if the flying height was 11 nm with no deformation in PZT.

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Section: Objectivementioning

confidence: 99%

Active-head slider with piezoelectric actuator using shear-mode deformation

et al. 2009

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“…Yeack-Scranton et al (1990) proposed an active slider for contact recording, where a piezoelectric material was inserted in a channel that ran across the full width of the slider at its top rear. They experimentally demonstrated movement of the read/write element from~200 nm to contact, but the proposed structure of piezoelectric actuator would be difficult to implement in the smaller currently used pico-or femtosized sliders.…”

Section: Introductionmentioning

confidence: 99%

Fabrication and experimental study of Al2O3-TiC sliders with piezoelectric nanoactuators for flying height control

et al. 2006

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A gap flying height (FH) of less than 5 nm between the read/write element and the surface of the disk is required for ultrahigh density recording. A stable and constant FH must also be sustained in the presence of altitude and temperature changes and manufacturing tolerance. A FH adjustment or controlled slider that is capable of adjusting its gap FH has been proposed previously. In this paper we demonstrate an inexpensive and low-temperature approach for integrating piezoelectric materials in the fabrication of current small form-factor Al 2 O 3 -TiC sliders. A bulk PZT sheet is bonded onto the back of row-bars and the sliders are separated by a standard dicing process. It requires no deep reactive-ion etching (DRIE) or high temperature processes and is suitable for mass production. A conventional design and a new special air bearing surface (ABS) design have been fabricated and tested by an optical profiler and a FH tester. A nonflying actuation stroke of 0.6-0.8 nm/V has been observed. The FH measurements showed that the ABS plays a key role in increasing the actuation efficiency, which also agrees well with the numerical analysis.

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“…Two sliders are interconnected by a deformable actuator which drives the head directly. Yeack-Scranton et al (1) developed an active slider in this scheme by mounting a bulk piezoelectric material in a slider. Kurita et al (2) and Tagawa et al (3) has been also studied the direct head actuation using a PZT actuator.…”

Section: Actuation Schemesmentioning

confidence: 99%

“…An active slider with an actuator was first proposed by YeackScranton et al (1) in 1990 for contact recording. Since then, various kinds of active sliders using a bulk PZT (2) , thin film PZT (3) and thermal actuators (4) have been reported.…”

Section: Introductionmentioning

confidence: 99%

A MEMS-Based Active-Head Slider for Flying Height Control in Magnetic Recording

Suzuki

Kurita

2004

JSME international journal. Ser. B, Fluids and thermal engineer

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This paper describes design and fabrication of a MEMS-based active-head slider using a PZT thin film for flying height control in hard disk drives. A piezoelectric cantilever integrated in an air bearing slider is used to adjust the flying height individually. A novel air bearing surface (ABS) geometry that minimizes the aerodynamic lift force generated beneath the head has been designed on the basis of the molecular gas film lubrication (MGL) theory. The slider with PZT actuator was fabricated monolithically by silicon micromachining.Performance of the actuator was tested by using an optical surface profiler. Furthermore, the fabricated slider was mounted on a suspension and flying height of the slider above a spinning disk has been measured by means of interferometry. Change in the head-disk spacing has been successfully confirmed by applying voltage to the PZT actuator.

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An active slider for practical contact recording

Cited by 69 publications

References 3 publications

Active-head slider with piezoelectric actuator using shear-mode deformation

Active-head slider with piezoelectric actuator using shear-mode deformation

Fabrication and experimental study of Al2O3-TiC sliders with piezoelectric nanoactuators for flying height control

A MEMS-Based Active-Head Slider for Flying Height Control in Magnetic Recording

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