An automatic smoothing algorithm for the calculation of impurity concentration from sheet resistivity and sheet hall coefficient data

Hill, Anthony C.; Allen, William G.; Bradley, R.A.

doi:10.1016/0038-1101(80)90087-8

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An automatic smoothing algorithm for the calculation of impurity concentration from sheet resistivity and sheet hall coefficient data

Cited by 4 publications

References 14 publications

Impurity and mobility profiling by channel conductance measurements

Impurity and mobility profiling by channel conductance measurements

Chapter 6 Studies of the Stripping Hall Effect in Ion-Implanted Silicon

Measurement of Hall scattering factor in phosphorus-doped silicon

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