2020
DOI: 10.1063/5.0011335
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An experimental study for characterization of size-dependence in microstructures via electrostatic pull-in instability technique

Abstract: This paper experimentally investigates the size-dependent effective Young's modulus () of Aluminum (Al) clamped-clamped microbeams using electrostatic pull-in instability technique. The study presents an experimental characterization of the so-called "length scale parameter" in couple stress theory and surface elasticity. The is retrieved from the measured pull-in voltage, of the clamped-clamped beams with different dimensions, via an electromechanically coupled equation. Measurement results show a strong size… Show more

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Cited by 13 publications
(7 citation statements)
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“…Experimental studies and atomistic/molecular dynamic modeling have been carried out by researchers to gain a thorough understanding of mechanical responses of structures at microscale and nanoscale. Due to the small-sized nature of specimens, experimental studies generally require high-precision apparatus and special testing procedure [ 8 ]. However, atomistic/molecular dynamic modeling is a viable method to characterize mechanical responses of micro-sized and nano-sized structures and can provide comprehensive simulation information [ 9 , 10 ] but high computational expense must be paid [ 11 ].…”
Section: Introductionmentioning
confidence: 99%
“…Experimental studies and atomistic/molecular dynamic modeling have been carried out by researchers to gain a thorough understanding of mechanical responses of structures at microscale and nanoscale. Due to the small-sized nature of specimens, experimental studies generally require high-precision apparatus and special testing procedure [ 8 ]. However, atomistic/molecular dynamic modeling is a viable method to characterize mechanical responses of micro-sized and nano-sized structures and can provide comprehensive simulation information [ 9 , 10 ] but high computational expense must be paid [ 11 ].…”
Section: Introductionmentioning
confidence: 99%
“…Generally, the most straightforward way to characterize the mechanical properties of structures is the experimental approach. Unfortunately, conducting an experiment on nano-sized structures is extremely cumbersome and requires a high-precision testing apparatus and a unique testing procedure [ 13 , 14 , 15 ]. The atomistic modeling approach based on the quantum mechanics theory could be a viable choice to characterize the mechanical properties of small-sized structures, but high computational costs and complex computational procedures inherently arise with this modeling approach [ 16 , 17 , 18 , 19 , 20 ].…”
Section: Introductionmentioning
confidence: 99%
“…In recent decades, advances in micro electro-mechanical systems (MEMS) including performance enhancement, low power consumption and low fabrication cost have attracted remarkable attention to the use of microdevices in various applications such as micromirrors [1], micro-switches [2], microresonators [3,4], pressure sensors [5], energy harvesters [6,7], gas sensors [8] and capacitive structures [9]. Nevertheless, among various microdevices, capacitive micromachined ultrasonic transducers due to their various benefits including reliable fabrication processes with ease and lower cost, integration with signal processing electronics, efficient performance, low impedance, higher resolution and high transduction coefficient became as an effective technology to overcome many constraints associated with traditional transducers and it can be considered as a primary candidate for next generation of transmitting and receiving ultrasound waves [10][11][12].…”
Section: Introductionmentioning
confidence: 99%
“…and the upper plate will be compelled to deflect by electrostatic attraction forces, however, the mechanical forces exerted from the movable plate can balance this deflection. An unstable point is where electrostatic force conquer mechanical stiffness of the plate [9,14]. This point is named pull-in.…”
Section: Introductionmentioning
confidence: 99%