In this paper, an N-type silicon line tunneling TFET (LT-TFET) with an ultra-shallow N + pocket was proposed. The pocket was formed by using the germanium preamorphization implantation (Ge PAI), arsenic ultra-low energy implantation and spike annealing. Due to the Ge PAI, the tunneling probability was improved significantly. As a result, a high on-state current of 40µA/µm, a minimum subthreshold swing (SS) of 69 mV/decade and an average SS of 80 mV/decade over 5 decades of drain current were achieved with V DS = V GS = 1 V at room temperature. It is shown that once the trap assisted tunneling is suppressedat the low temperature, the band-to-band tunneling becomes dominant. When the temperature decreases from 300 K to 4.9 K, the on-state current only reduces 20% and a minimumpoint SS of 10 mV/decadewas obtained. The LT-TFET exhibits improved transconductance efficiency at deep cryogenic temperature range. The proposed structure in this work shows attractive merits in the cryogenic digital and analog application. INDEX TERMS TFET Ge PAI, line tunneling, cryogenic temperature.