An integrated pyroelectric infrared sensor with a PZT thin film

Chang, Chung‐Cheng; Tang, C. S.

doi:10.1016/s0924-4247(97)01663-4

Cited by 52 publications

(31 citation statements)

References 8 publications

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“…[1][2][3][4] Among the various ferroelectric materials, PbZr 1-x Ti x O 3 (PZT) thin films are widely investigated due to their stability in most of the device operating ranges and remarkable ferroelectric properties. The superior properties of PZT thin films are ascribed to their extraordinary dielectric and piezoelectric behaviors around the morphotropic phase boundary (MPB, about Zr:Ti=52:48) where the properties are enhanced.…”

Section: Introductionmentioning

confidence: 99%

Defect enhanced optic and electro-optic properties of lead zirconate titanate thin films

Zhu

2011

AIP Advances

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Pb(Zr1-xTix)O3 (PZT) thin films near phase morphotropic phase boundary were deposited on (Pb0.86La0.14)TiO3-coated glass by radio frequency sputtering. A retrieved analysis shows that the lattice parameters of the as-grown PZT thin films were similar to that of monoclinic PZT structure. Moreover, the PZT thin films possessed refractive index as high as 2.504 in TE model and 2.431 in TM model. The as-grown PZT thin film had one strong absorption peak at 632.6 nm, which attributed to lead deficiency by quantitative XPS analysis. From the attractive properties achieved, electro-optic and photovoltaic characteristic of the films were carried out

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Section: Introductionmentioning

confidence: 99%

Defect enhanced optic and electro-optic properties of lead zirconate titanate thin films

Zhu

2011

AIP Advances

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“…[1][2][3][4][5] Stability of the ferroelectric and piezoelectric properties such as switchable polarization is a key requisite in long term operation of these devices. However, it is observed that the switchable polarization of PZT films decreases when the PZT films are used for increased number of bipolar-voltage cycles.…”

Section: Introductionmentioning

confidence: 99%

Polarization recovery in lead zirconate titanate thin films deposited on nanosheets-buffered Si (001)

et al. 2016

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Fatigue behavior of Pb(Zr,Ti)O3 (PZT) films is one of the deterrent factors that limits the use of these films in technological applications. Thus, understanding and minimization of the fatigue behavior is highly beneficial for fabricating reliable devices using PZT films. We have investigated the fatigue behavior of preferentially oriented PZT films deposited on nanosheets-buffered Si substrates using LaNiO3 bottom and top electrodes. The films show fatigue of up to 10% at 100 kHz, whereas no fatigue has been observed at 1 MHz. This frequency dependence of the fatigue behavior is found to be in accordance with Dawber–Scott fatigue model that explains the origin of the fatigue as migration of oxygen vacancies. Interestingly, a partial recovery of remnant polarization up to ∼97% of the maximum value is observed after 4×109 cycles which can be further extended to full recovery by increasing the applied electric field. This full recovery is qualitatively explained using kinetic approach as a manifestation of depinning of domains walls. The understanding of the fatigue behavior and polarization recovery that is explained in this paper can be highly useful in developing more reliable PZT devices.

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“…Pyroelectric infrared sensors are mature technology to obtain the thermal image contactlessly [8][9][10][11][12][13]. A PZT thin film is also actively researched for a pyroelectric material, and is established to deposit with high compatibility for the micromachining [14][15][16]. Figure 1 shows a schematic illustration of the non-contact thermal diagnostic system we propose.…”

Section: Introductionmentioning

confidence: 99%

Micromachined Pyroelectric Probe for Non-Contact Thermal Diagnostic Systems

Suita

Hara

Ishikawa

et al. 2013

JAMDSM

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This paper describes a micro cantilever integrated with a pyroelectric infrared detector for non-contact scanning thermal microscopy (SThM). Pb(Zr,Ti)O 3 (PZT) was deposited on the cantilever tip with a sol-gel method as a pyroelectric sensor. An X-ray diffraction (XRD) pattern of the deposited PZT film clearly indicated PZT (111) peak. A full width of half maximum intensity (FWHM) of 3.34° was achieved in the rocking curve of PZT (111) peak. The fabricated device was verified with a chopped infrared light. As a result, we succeeded to detect the switching of the thermal source with the cantilever experimentally.

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An integrated pyroelectric infrared sensor with a PZT thin film

Cited by 52 publications

References 8 publications

Defect enhanced optic and electro-optic properties of lead zirconate titanate thin films

Defect enhanced optic and electro-optic properties of lead zirconate titanate thin films

Polarization recovery in lead zirconate titanate thin films deposited on nanosheets-buffered Si (001)

Micromachined Pyroelectric Probe for Non-Contact Thermal Diagnostic Systems

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