An intermode-coupled thin-film micro-acoustic resonator

Arapan, Lilia; Katardjiev, Ilia; Yantchev, Ventsislav

doi:10.1088/0960-1317/22/8/085004

Cited by 6 publications

(2 citation statements)

References 21 publications

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“…Other Lamb waves and principles of energy confinement are under investigation. Recently LWR employing other principles than reflection were demonstrated in proof of concept studies [59,60]. More specifically, these include the employment of the zero group velocity characteristic of the S 1 Lamb wave as well as the conversion of the S 0 mode into the fundamental thickness shear plate resonance.…”

Section: Discussionmentioning

confidence: 99%

Thin film Lamb wave resonators in frequency control and sensing applications: a review

Yantchev¹,

Katardjiev²

2013

J. Micromech. Microeng.

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140

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This work makes an overview of the progress made during the last decade with regard to a novel class of piezoelectric microwave devices employing acoustic Lamb waves in micromachined thin film membranes. This class of devices is referred to as either thin film Lamb wave resonators or piezoelectric contour-mode resonators both employing thin film aluminum nitride membranes. These devices are of interest for applications in both frequency control and sensing. High quality factor Lamb wave resonators exhibiting low noise, low loss and thermally stable performance are demonstrated and their application in high resolution gravimetric and pressure sensors further discussed. A specific emphasis is put on the ability of these devices to operate in contact with liquids. Future research directions are further outlined.

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Section: Discussionmentioning

confidence: 99%

Thin film Lamb wave resonators in frequency control and sensing applications: a review

Yantchev¹,

Katardjiev²

2013

J. Micromech. Microeng.

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140

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“…The Lamb wave resonators using S 0 mode in AlN membranes have been reported as an impressive resonator structure [26,27]. Due to a combination of their unique advantages, such as an extremely high velocity, low dispersion and moderate piezoelectric coupling [28], AlN Lamb wave resonators have been applied in frequency controlling and sensing applications [29,30].…”

Section: Comparison With the Aln Lamb Wave Resonator In Q × F Product...mentioning

confidence: 99%

AlN micromechanical radial-contour disc resonator

Wang¹,

Xu²,

Ababneh³

et al. 2013

J. Micromech. Microeng.

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Micromechanical resonators that have high performance and are small in size are competitive candidates for radio frequency (RF) device minimization, paving the way for high performance monolithic transceivers. A piezoelectric aluminium nitride radial-contour mode disc resonator with a CMOS-compatible fabrication process is presented. The piezoelectric properties of the resonator disc, concerning the driving voltage and resonance mode deformation, are analysed, revealing the advantages introduced when using a sputter deposited AlN thin film. The radial-contour resonance mode of the disc resonator was investigated by finite element method simulation and theoretical evaluation. The resonance frequency was found to be thickness-independent, which is beneficial for fabrication and integration. In view of CMOS compatibility, a fabrication process with a low thermal budget and a tungsten titanium sacrificial layer was designed; devices were fabricated on 4 inch silicon wafers. The RF performance of the resonators with a diameter of 150 µm was measured using a HP4395A network analyzer, yielding a resonant frequency of 14.11 MHz with a Q value of 3125 and a return loss of 31.46 dB. These results indicate that this device is attractive for use in RF frequency-selecting and generation devices in high performance wireless communication systems.

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