An Optical Instrument for Measuring the Surface Roughness in Production Control

Laser methods based on an analysis of scattered light for automated, in-process inspection of machined surfaces: A review

“…Rodenstock to begin commercial production, in 1984, of RM 400 and RM 500 systems described in detail in the work [52].…”

Towards the development of a hybrid-integrated chip interferometer for online surface profile measurements

“…[9][10][11] Methods like light scattering and speckle have been developed for online measurements but they only give an indirect estimation of some surface characteristics and do not obtain the surface profile. 5,[12][13][14] Most commonly an optical interferometry is utilized for sensitive measurements at very high precision. Various open space and fibre based online interferometry systems for surface measurements have been demonstrated.…”

Development of on the machine process monitoring and control strategy in Robot Assisted Polishing

“…An optical method based on angle resolved light scattering was shown in [8] to be insensitive to vertical displacement and limited tilting of part surface, thus being potentially suitable for implementation in a production environment with the presence of vibrations. The method was used for measurement of roughness in a wide range of tests in a production environment demonstrating its capability to determine differences in high quality fine surfaces [3].…”