2015
DOI: 10.1016/j.ijleo.2015.07.009
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Laser methods based on an analysis of scattered light for automated, in-process inspection of machined surfaces: A review

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Cited by 18 publications
(7 citation statements)
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“…For example, a three-dimensional model of one single diamond grain has been reconstructed using LSM [15]. Moreover, topography characterization using laser methods has also been implemented as in-process inspection method in several abrasive machining processes [16]. The topography of grain protrusion of the truncated diamond grinding wheel has been visualized using laser methods, and some important parameters such as protrusion number, height etc.…”
Section: Introductionmentioning
confidence: 99%
“…For example, a three-dimensional model of one single diamond grain has been reconstructed using LSM [15]. Moreover, topography characterization using laser methods has also been implemented as in-process inspection method in several abrasive machining processes [16]. The topography of grain protrusion of the truncated diamond grinding wheel has been visualized using laser methods, and some important parameters such as protrusion number, height etc.…”
Section: Introductionmentioning
confidence: 99%
“…Moreover, samples must be perfectly flat and with roughness lower than 5 nm [ 15 , 16 ]. The literature also reports some attempts to apply scatterometry for in-line measurements [ 17 , 18 ]; Laser speckle photography: the contrast of the speckle image is used to trace back to surface roughness. It is needed a translation of the surface or the detector to have an intensity of the speckle field high enough for the calculation.…”
Section: Introductionmentioning
confidence: 99%
“…Moreover, samples must be perfectly flat and with roughness lower than 5 nm [ 15 , 16 ]. The literature also reports some attempts to apply scatterometry for in-line measurements [ 17 , 18 ];…”
Section: Introductionmentioning
confidence: 99%
“…Contact measurements provide good presentation of surface morphology, but the time needed to gather data is much longer than that required by the contactless methods [25]. Contactless methods are optical methods, which can themselves be divided into the optical confocal method, interferometry, scatterometry, triangulation, and the structured light method [26][27][28][29].…”
Section: Introductionmentioning
confidence: 99%
“…Real-time measurement is also possible for OCT, due to flexible positioning of its scanning head over the surface of the material moving at a low speed [30]. Depending on the physical phenomena used during the measurement process, the results may depend on the physical properties of the surface [24,25].…”
Section: Introductionmentioning
confidence: 99%