Analysis and testing of a silicon intrinsic-point heater in a micropropulsion application

Bayt, Robert L.; Breuer, Kenneth S.

doi:10.1016/s0924-4247(01)00594-5

Cited by 30 publications

(25 citation statements)

References 5 publications

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“…Platinum temperature coefficient of resistivity (3.927 ) is relatively constant over a wide temperature range, which makes it possible to use the heater also as a thermometer. A micropropulsion system with doped boron areas as heaters has been described in the literature [15]. In that application, the high operating temperatures, up to 1100 , excluded metallic heater elements.…”

Section: Heatermentioning

confidence: 99%

A Microfabricated Nebulizer for Liquid Vaporization in Chemical Analysis

Franssila¹,

Marttila²,

Kolari

et al. 2006

J. Microelectromech. Syst.

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A miniaturized nebulizer chip for vaporization of liquid samples for mass spectrometry has been designed, fabricated, and characterized for fluidic and thermal performance. Silicon/glass chip has a liquid sample channel placed centrally between symmetric nebulizer gas channels. The liquid sample is nebulized and vaporised by an integrated platinum heater. The vaporized sample exits through an etched nozzle, and is ionized by an external corona needle. The ions are analysed by a mass spectrometer. The chip has been fabricated in both anisotropically wet etched and DRIE versions in silicon, with an anodically bonded Pyrex glass cover plate. Three different fluidic inlet designs are presented, with both through-wafer and edge insert versions. The shape of the erupting gas jet has been visualized by infrared thermography by using a low-diffusivity imaging screen and high heat capacity helium as a test gas. Dimensions of the jet's thermal footprint on the screen show that the jet is very narrow and confined, and this is confirmed in mass spectrometry results. This confined jet supplies the sample to the ionization region near corona tip, enabling efficient use of very small sample amounts and submicroliter flows.[1591]

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Section: Heatermentioning

confidence: 99%

A Microfabricated Nebulizer for Liquid Vaporization in Chemical Analysis

Franssila¹,

Marttila²,

Kolari

et al. 2006

J. Microelectromech. Syst.

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“…Micro-thrusters have been paid great attention by scientists in many countries. Several types of micropropulsion systems are proposed, such as single phase cold/ hot flow micro-thruster [3][4][5], solid propellant micro-thruster array [6,7], pulsed plasma micro-thruster [8], electrospray micro-thruster [9], etc.…”

Section: Introductionmentioning

confidence: 99%

Performance evaluation and flow visualization of a MEMS based vaporizing liquid micro-thruster

Cen

2010

Acta Astronautica

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MEMS micro-thruster is promising for future applications in precision formation flying missions. This paper presents performance evaluation and two-phase flow pattern visualization of a vaporized liquid micro-thruster (VLM). Micro-thrust force of several milli-Newtons was measured by a test rig with a lever. Flow patterns in the micro-thruster chip were visualized by a high speed camera bonded with a microscope. We found that flow patterns influenced its specific impulse and there were several types of flow boiling patterns in the thruster chip. Thrust instability was discussed as well. The results are helpful to understand flow characteristics of a VLM and improve its performance.

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“…In effect, the MEMS vacuum interface described here replicates the function of a single-piece convergent-divergent nozzle but with the tasks of accelerating the gas flow and supersonic expansion being separated by an intermediate free jet. Arguably, the same effect could have been achieved using a convergent-divergent MEMS nozzle [24,27,28,30]. However, the present arrangement has the advantage that beam transmission to the second stage can be modulated remotely at the first stage pump (for example, using a solenoid valve to alter the throttling).…”

Section: Expansion Into the Second Stage And Collimated Beam Productionmentioning

confidence: 80%

“…Numerous nozzle-based MEMS micro-thrusters have been developed for micro-satellite attitude adjustment. For example, square-section silicon nozzles have been fabricated by throughwafer anisotropic etching [24,25] and 2D nozzles with vertical walls have been formed by anisotropic plasma etching [26][27][28][29][30][31]. MEMS nozzles are often fabricated as multilayer stacks [24,25,30,32].…”

Section: Previous Work On Mems Nozzles and Micro-jets And Miniature Smentioning

confidence: 99%

Supersonic jet interactions with a micro-engineered skimmer

Wright¹,

Syms²

2018

J. Micromech. Microeng.

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A micro-engineered, skimmer-based vacuum interface has been demonstrated and used to investigate gas dynamics on a sub-millimeter length scale. The interface is fabricated as a stacked assembly of silicon dies, based on an anisotropically etched inlet orifice and a pyramidal skimmer cone formed in electroplated nickel. Expansion of gas into vacuum, interaction of a supersonic jet with the skimmer and transmission of a collimated beam into a second vacuum stage have all been imaged with a schlieren microscope. Using a glasswalled vacuum chamber, flow patterns upstream and fully downstream of the skimmer have been imaged together for the first time. At low first-stage pressures, the 150-200 µm tall skimmers cannot fully penetrate the shock arising from interaction of the jet with the back wall. However, as the pressure is increased, a multiple shock cell structure evolves, the jet narrows and transmission rises sharply. Eventually, a collimated beam is transmitted to the second stage. When the skimmer aperture is smaller than the source aperture, a series of distinct peaks is evident in a plot of transmission against first-stage pressure. Imaging shows that at each successive peak, the number of shock cells increases by one and the skimmer inlet is coincident with a node.

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Analysis and testing of a silicon intrinsic-point heater in a micropropulsion application

Cited by 30 publications

References 5 publications

A Microfabricated Nebulizer for Liquid Vaporization in Chemical Analysis

A Microfabricated Nebulizer for Liquid Vaporization in Chemical Analysis

Performance evaluation and flow visualization of a MEMS based vaporizing liquid micro-thruster

Supersonic jet interactions with a micro-engineered skimmer

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