Analysis of Cr/Au contact reliability in embedded poly-Si micro-heater for FET-type gas sensor

Park, Jin-Woo; Jung, Gyuweon; Hong, Seongbin; Jeong, Yujeong; Shin, Wonjun; Kim, Dong‐Hee; Lee, Chayoung; Lee, Jong-Ho

doi:10.1016/j.snb.2022.131673

Cited by 9 publications

(2 citation statements)

References 38 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Heating small areas with microheaters is an important task for several applications, from flow-sensing [ 37 , 38 ], degassing, driving and assisting electrochemical sensors [ 39 , 40 , 41 , 42 , 43 , 44 ], to microfluidic system temperature control and sensing [ 45 , 46 , 47 ]. Carbon and graphene-based printed devices have recently demonstrated unprecedented performance in temperature sensing and microheater fabrication [ 16 , 48 , 49 , 50 , 51 ]; due to their unique properties, such as high mechanical durability, resistance to environmental corrosion and contamination, and an ability to reach high temperatures without changing their properties, these materials are excellent candidates for these applications.…”

Section: Introductionmentioning

confidence: 99%

Study of Single and Multipass f–rGO Inkjet-Printed Structures with Various Concentrations: Electrical and Thermal Evaluation

Apostolakis

Barmpakos

Pilatis

et al. 2023

Sensors

View full text Add to dashboard Cite

Reduced graphene oxide (rGO) is a derivative of graphene, which has been widely used as the conductive pigment of many water-based inks and is recognized as one of the most promising graphene-based materials for large-scale and low-cost production processes. In this work, we evaluate a custom functionalised reduced graphene oxide ink (f–rGO) via inkjet-printing technology. Test line structures were designed and fabricated by the inkjet printing process using the f–rGO ink on a pretreated polyimide substrate. For the electrical characterisation of these devices, two-point (2P) and four-point (4P) probe measurements were implemented. The results showed a major effect of the number of printed passes on the resulting resistance for all ink concentrations in both 2P and 4P cases. Interesting results can be extracted by comparing the obtained multipass resistance values that results to similar effective concentration with less passes. These measurements can provide the ground to grasp the variation in resistance values due to the different ink concentrations, and printing passes and can provide a useful guide in achieving specific resistance values with adequate precision. Accompanying topography measurements have been conducted with white-light interferometry. Furthermore, thermal characterisation was carried out to evaluate the operation of the devices as temperature sensors and heaters. It has been found that ink concentration and printing passes directly influence the performance of both the temperature sensors and heaters.

show abstract

Section: Introductionmentioning

confidence: 99%

Study of Single and Multipass f–rGO Inkjet-Printed Structures with Various Concentrations: Electrical and Thermal Evaluation

Apostolakis

Barmpakos

Pilatis

et al. 2023

Sensors

View full text Add to dashboard Cite

show abstract

“…However, the reliability of the sensor is influenced not only by the sensing material (MOX), but also by the transducer of the sensor [12][13][14]. In particular, when configuring a sensitive amplifier circuit with n-and p-channel FETtype (nFET and pFET) gas sensors, the nFET-type gas sensor is exposed to iterative off-state stress (OSS) during the circuit operation [15][16][17].…”

Section: Introductionmentioning

confidence: 99%

Recovery of off-state stress-induced damage in FET-type gas sensor using self-curing method

et al. 2023

Self Cite

View full text Add to dashboard Cite

The need for high-performance gas sensors is driven by concerns over indoor and outdoor air quality, and industrial gas leaks. Due to their structural diversity, vast surface area, and geometric tunability, metal oxides show significant potential for the development of gas sensing systems. Despite the fact that several previous reports have successfully acquired a suitable response to various types of target gases, it remains difficult to maintain the reliability of metal oxide-based gas sensors. In particular, the degradation of the sensor platform under repetitive operation, such as off-state stress (OSS) causes significant reliability issues. We investigate the impact of OSS on the gas sensing performances, including response, low-frequency noise, and signal-to-noise ratio of horizontal floating-gate field-effect-transistor (FET)-type gas sensors. The 1/f noise is increased after the OSS is applied to the sensor because the gate oxide is damaged by hot holes. Therefore, the SNR of the sensor is degraded by the OSS. We applied a self-curing method based on a PN-junction forward current at the body–drain junction to repair the damaged gate oxide and improve the reliability of the sensor. It has been demonstrated that the SNR degradation caused by the OSS can be successfully recovered by the self-curing method.

show abstract

Low-frequency noise in gas sensors: A review

Shin

Hong

Jeong

et al. 2023

Sensors and Actuators B: Chemical

View full text Add to dashboard Cite

Analysis of Cr/Au contact reliability in embedded poly-Si micro-heater for FET-type gas sensor

Cited by 9 publications

References 38 publications

Study of Single and Multipass f–rGO Inkjet-Printed Structures with Various Concentrations: Electrical and Thermal Evaluation

Study of Single and Multipass f–rGO Inkjet-Printed Structures with Various Concentrations: Electrical and Thermal Evaluation

Recovery of off-state stress-induced damage in FET-type gas sensor using self-curing method

Low-frequency noise in gas sensors: A review

Contact Info

Product

Resources

About