“…However, when the electrons of low (1-8 keV) and medium (8-50 keV) energies decelerate in the semiconductor, only a small part of energy goes to the formation of informative signals, the most part of the energy goes to heating the sample [1,2]. When the target is irradiated by a sharply focused electron beam, the heating of the sample can be significant, which can lead to an increase in the local temperature and, as a consequence, to a change in the characteristics of the semiconductor -this may lead to the necessity to take this into account on carrying out the quantitative measurements.…”