Analysis of surface acoustic wave resonance properties on piezoelectric substrates with periodic voids

Abstract

The resonance properties of leaky surface acoustic waves (LSAWs) and longitudinal LSAWs (LLSAWs) on bonded structures consisting of a LiNbO3 (LN) thin plate and a support substrate, with periodic voids exhibiting a rectangular cross-section, were simulated using the finite element method. The voids were placed below the electrode at the boundary between the LN thin plate and support substrate and the same pitch and period as the electrode. LN, quartz, glass, or Si were used as support substrates. Simulations revealed that by introducing periodic voids, resonance properties similar to those of the SH0-mode plate and S0-mode Lamb waves can be obtained. The values of the simulated fractional bandwidths of approximately 13 and 18% were found for LSAW and LLSAW, respectively, when the ratio of the width of the void to the pitch of the electrode was 0.7.

SAW velocity reduction and spurious modes suppression on the layer structure

“…This is because spurious responses in the return loss should be also suppressed for this application to avoid deterioration of the insertion loss for the other bands. 12,16) One solution to overcome this difficulty is the use of layered SAW structures [8][9][10][11][12][18][19][20][21][22][23][24][25] such as I.H.P. SAW.…”

Analysis of propagation and resonance properties of longitudinal leaky surface acoustic wave on LiNbO3/SiC bonded structure

“…Longitudinal LSAWs (LLSAWs) with a phase velocity 1.5-2 times higher than that of LSAWs are attracting increasing attention for realizing higher operating frequencies. [1][2][3][4][5][6][7][8][9][10][11] However, it is difficult to obtain effective resonance properties with single substrates of LiTaO 3 (LT) or LiNbO 3 (LN) owing to the radiation of shear vertical (SV) and shear horizontal (SH) bulk waves into the substrate.…”