Analysis of Thermally Actuated RF-MEMS Switches for Power Limiter Applications

Shojaei-Asanjan, Desireh; Bakri-Kassem, Maher; Mansour, Raafat R.

doi:10.1109/jmems.2018.2881128

Cited by 25 publications

(8 citation statements)

References 18 publications

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“…On the other hand, non-silicon switches are mainly fabricated from LIGA (lithographie, galvanoformung and abformung) or ultra-precision processing technology. For metal-based switches, multi-layer suspended movable structures are usually fabricated from Ni via micro-electroplating [ 30 , 31 , 32 ]. In contrast to the properties of silicon-based switches, metal structures provide excellent electrical conductivity, as well as good mechanical properties and toughness.…”

Section: Introductionmentioning

confidence: 99%

Research Status and Development Trend of MEMS Switches: A Review

Cao

Zhao

2020

Micromachines

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MEMS switch is a movable device manufactured by means of semiconductor technology, possessing many incomparable advantages such as a small volume, low power consumption, high integration, etc. This paper reviews recent research of MEMS switches, pointing out the important performance indexes and systematically summarizing the classification according to driving principles. Then, a comparative study of current MEMS switches stressing their strengths and drawbacks is presented, based on performance requirements such as driven voltage, power consumption, and reliability. The efforts of teams to optimize MEMS switches are introduced and the applications of switches with different driving principles are also briefly reviewed. Furthermore, the development trend of MEMS switch and the research gaps are discussed. Finally, a summary and forecast about MEMS switches is given with the aim of providing a reference for future research in this domain.

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Section: Introductionmentioning

confidence: 99%

Research Status and Development Trend of MEMS Switches: A Review

Cao

Zhao

2020

Micromachines

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“…Additionally, optimizing the switch design to minimize current densities, incorporating protective coatings, and developing innovative contact materials are areas of active research to improve the reliability of both capacitive and ohmic MEMS switches during hot switching events [91]. By advancing materials and design strategies, researchers aim to extend the lifespan and robustness of MEMS switches, ensuring their reliable performance in demanding applications [92,93].…”

Section: Reliabilitymentioning

confidence: 99%

MEMS Switch Realities: Addressing Challenges and Pioneering Solutions

Kurmendra,

Agarwal

2024

Micromachines

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Micro-Electro-Mechanical System (MEMS) switches have emerged as pivotal components in the realm of miniature electronic devices, promising unprecedented advancements in size, power consumption, and versatility. This literature review paper meticulously examines the key issues and challenges encountered in the development and application of MEMS switches. The comprehensive survey encompasses critical aspects such as material selection, fabrication intricacies, performance metrics including switching time and reliability, and the impact of these switches on diverse technological domains. The review critically analyzes the influence of design parameters, actuation mechanisms, and material properties on the performance of MEMS switches. Additionally, it explores recent advancements, breakthroughs, and innovative solutions proposed by researchers to address these challenges. The synthesis of the existing literature not only elucidates the current state of MEMS switch technology but also paves the way for future research avenues. The findings presented herein serve as a valuable resource for researchers, engineers, and technologists engaged in advancing MEMS switch technology, offering insights into the current landscape and guiding future endeavors in this rapidly evolving field.

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“…Power limiters are also implemented in a diverse array of technologies including semiconductor diode [6], [7], FET [8]- [10], ferromagnetic [11]- [13], MEMS [14], [15], and plasma [16]- [20]. Power limiting is important for the protection of sensitive RF and microwave systems.…”

Section: Introductionmentioning

confidence: 99%

Plasma-Based Power Limitation for Highly Linear MEMS Switch Protection and Isolation Enhancement

2020

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A novel hybrid approach integrating a MEMS switch with a gas discharge tube plasma cell to enhance switch survivability and isolation, especially at high incident power levels, is demonstrated. The theory of operation is discussed including consideration of the underlying plasma phenomena as well as the practical integration details. Measurement of a fabricated prototype is presented. Discussion of measurement challenges and potential solutions is accompanied by detailed explanations of measurement practice. Measurements provide insights into applied RF plasmas not present in the body of literature. Wideband enhancement of isolation by more than 10 dB at 50 W incident power is observed in a quasi-absorptive mode with increasing isolation over power. No penalty to the excellent linearity of MEMS switches is detected with a measured IIP3 of 75.3 dBm. Advantages in linearity as compared to semiconductor-based power limiting solutions are shown and demonstrate state-of-the-art performance. An incremental insertion loss of less than 0.2 dB with a return loss better than 12.5 dB is reported. Measurement of the effects on MEMS switch timing parameters as well as time domain characterization of the plasma breakdown is included.

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Analysis of Thermally Actuated RF-MEMS Switches for Power Limiter Applications

Cited by 25 publications

References 18 publications

Research Status and Development Trend of MEMS Switches: A Review

Research Status and Development Trend of MEMS Switches: A Review

MEMS Switch Realities: Addressing Challenges and Pioneering Solutions

Plasma-Based Power Limitation for Highly Linear MEMS Switch Protection and Isolation Enhancement

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