Although it possesses the capabilities of both anti-contamination and rapid response, the deflector jet servo valve is still confronted with the issue of weak performance robustness, usually manifesting as considerable uncertainty of the product pressure indices. To elaborate on the complex internal mechanism of deflector jet valves and figure out the origins of performance fluctuations, a three-dimensional mathematical model of the deflector jet pilot valve is constructed, in which a series of assumptions are presented to apply specific theorems to different regions of the flow field. Numerical simulations and experiments show that this theoretical system can provide a distinct and logical explanation for both the internal flow distribution and the external performance of the servo valve. On this basis, the causes of performance fluctuations are discussed, concerning the installation error of the deflector and the machining error of the shunt wedge. Calculations show that the latter can bring about remarkable performance variation. Quantificationally, a 10 micron width error of the shunt wedge will induce 7.4% and 3.6% drifts of the receiver pressure and the pressure gain, respectively. However, further analyses confirm that a decrease in the deflector jet distance will lead to dramatic deterioration of the valve’s susceptibility to errors. Hence, it is concluded that to enhance the performance robustness of servo valve products, the machining accuracy of the shunt wedge and non-negative errors of the deflector jet distance should both be guaranteed.