Analysis of tungsten and titanium migration during ESD contact burnout

Walker, Andrew; Le, Krasnov; Shearer, J.; Mahajani, M.

doi:10.1109/ted.2003.814972

Search citation statements

Order By: Relevance

Paper Sections

Select...

Other Fib Applications Preparation Of Sem Cross-sections1

Citation Types

Supporting

Mentioning

Contrasting

Year Published

2006

2009

Publication Types

Select...

Article2

Relationship

Self Cite0

Independent2

Authors

Journals

Cited by 2 publications

(1 citation statement)

References 16 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…FIBs have also been used to prepare specimen for other techniques such as electron back scatter diffraction (EBSD) (Baker et al, 2000) and Auger analysis (Walker et al, 2003;Wannaparhun et al, 2001). For example, Prasad et al (2003) prepared SEM cross-sections through shallow wear scars in electroformed Ni and used EBSD to study wear-induced microstructural changes.…”

Section: Other Fib Applications Preparation Of Sem Cross-sectionsmentioning

confidence: 99%

Focused ion beams techniques for nanomaterials characterization

Langford

2006

Microscopy Res & Technique

114

View full text Add to dashboard Cite

Focused ion beam and dual platform systems have, over the last 10 years, become a main stay of sample preparation for material analysis. In this article the merits of using these systems are discussed and the three main techniques used to prepare cross-section specimens for transmission electron microscopy (TEM) are both discussed and compared with emphasis being placed on the tricks that users do to make the lamellae as thin as possible and with a minimum of damage at their sidewalls. Other techniques such as serial slicing for three-dimensional reconstruction and the preparation of plan-view specimens are also summarized.

show abstract