The paper presents the principles and the results of the implementation of dielectrophoresis for separation and identification of rare cells such as circulation tumor cells (CTCs) from diluted blood specimens in media and further label-free identification of the origins of separated cells using radio-frequency (RF) imaging. The separation and the identification units use same fabrication methods which enable system integration on the same platform. The designs use the advantage of higher surface volume ratio which represents the particular feature for micro-and nanotechnologies. Diluted blood in solution of sucrose-dextrose 1-10 is used for cell separation that yields more than 95.3% efficiency. For enhanced sensitivity in identification, RF imaging is performed in 3.5-1 solution of glycerol and trypsin. Resonance cavity performance method is used to determine the constant permittivity of the cell lines. The results illustrated by the signature of specific cells subjected to RF imaging suggest a reliable label-free single cell detection method for identification of the type of CTC.