Angle-resolved photoelectron spectra of layers of finite thickness

Abstract

The procedure for calculating X ray photoelectron spectra in wide ranges of energy losses and viewing angles is developed. The spectra of semi infinite samples and finite thickness layers are studied. The angular and energy spectra are analyzed via a solution to the problem for the function of photoelectron emis sion flux density by means of the invariant embedding method. The energy spectrum is represented in the form of a number of inelastic collisions. The results of exact numerical solution of the problem of multiple photoelectron scattering in solids using the straight line and small angle approximations, experimental data, and results of Monte Carlo simulation are compared. Errors in calculations using the straight line approxi mation and the advantages of models for describing the spectra in the framework of the small angle approx imation are revealed.