Angular distribution of atoms sputtered from germanium by 1–20 keV Ar ions

Chernysh, V. S.; Patrakeev, Andrey; Shulga, V. I.

doi:10.1080/10420150600966059

Cited by 12 publications

(3 citation statements)

References 12 publications

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“…The ion beam diameter was 1.3 mm, and fluences of bombarding ions were about 10 17 ion/cm2. A collector technique was used to measure angular distributions of sputtered material [8,9].…”

Section: Methodsmentioning

confidence: 99%

The new mechanism of sputtering with cluster ion beams

Chernysh

Ieshkin

Ermakov

2015

Applied Surface Science

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“…The ion beam diameter was 1.3 mm, and fluences of bombarding ions were about 10 17 ion/cm2. A collector technique was used to measure angular distributions of sputtered material [8,9].…”

Section: Methodsmentioning

confidence: 99%

The new mechanism of sputtering with cluster ion beams

Chernysh

Ieshkin

Ermakov

2015

Applied Surface Science

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“…Simulation of the energy distributions assuming, e.g., the Sigmund-Thompson distribution requires a priori knowledge of the surface binding energy for each element. The angular distribution, on the other hand, can to a reasonable accuracy be described by a cos n function, where the exponent n can vary significantly among elements and also depends on the sputtering gas and the energy of the incident sputteringgas atoms [118,119,120]. For MAX-phase targets, the angular distributions of M, A, and X are neither known nor readily estimated.…”

mentioning

confidence: 99%

The M+1AX phases: Materials science and thin-film processing

et al. 2010

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This article is a critical review of the M n+1 AX n phases ("MAX phases", where n =1, 2, or 3) from a materials science perspective. MAX phases are a class of hexagonal-structure ternary carbides and nitrides ("X") of a transition metal ("M") and an A-group element. The most well known are Ti 2 AlC, Ti 3 SiC 2 , and Ti 4 AlN 3 . There are ~60 MAX phases with at least 9 discovered in the last five years alone. What makes the MAX phases fascinating and potentially useful is their remarkable combination of chemical, physical, electrical, and mechanical properties, which in many ways combine the characteristics of metals and ceramics. For example, MAX phases are typically resistant to oxidation and corrosion, elastically stiff, but at the same time they exhibit high thermal and electrical conductivities and are machinable. These properties stem from an inherently nanolaminated crystal structure, with M n+1 X n slabs intercalated with pure A-element layers. The research on MAX phases has been accelerated by the introduction of thin-film processing methods.Magnetron sputtering and arc deposition have been employed to synthesize single-crystal material by epitaxial growth, which enables studies of fundamental materials properties. However, the surface-initiated decomposition of M n+1 AX n thin films into MX compounds at temperatures of 1000-1100 °C is much lower than the decomposition temperatures typically reported for the corresponding bulk material. We also review the prospects for low-temperature synthesis, which is essential for deposition of MAX phases onto technologically important substrates. While deposition of MAX phases from the archetypical Ti-Si-C and Ti-Al-N systems typically require synthesis temperatures of ~800 °C, recent results have demonstrated that V 2 GeC and Cr 2 AlC can be deposited at ~450 °C. Also, thermal spray of Ti 2 AlC powder has been used to produce thick coatings. We further treat progress in the use of first-principles calculations for predicting hypothetical MAX phases and their properties. Together with advances in processing and materials 3 analysis, this progress has led to recent discoveries of numerous new MAX phases such as Ti 4 SiC 3 , Ta 4 AlC 3 , and Ti 3 SnC 2 . Finally, important future research directions are discussed. These include charting the unknown regions in phase diagrams to discover new equilibrium and metastable phases, as well as research challenges in understanding their physical properties, such as the effects of anisotropy, impurities, and vacancies on the electrical properties, and unexplored properties such as superconductivity, magnetism, and optics. 4

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“…To obtain the angular distribution of sputtered atoms, we used the collector technique that is widely applied in the literature and considered the most reliable (e.g., other studies 13–18 ). Sputtered particles were collecting on a polymer substrate foil placed around the target.…”

Section: Methodsmentioning

confidence: 99%

Angular distribution of particles sputtered from a copper target by 5‐keV Kr ions: Experiment and simulation study

Afkir

Fqih

Jadoual

et al. 2021

Surface & Interface Analysis

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Angular distributions of atoms sputtered from a copper target under 5‐keV Kr+ bombardment at normal incidence were simultaneously and independently studied by experiments and computer simulation. The sputtered particles are collected on a Mylar™ foil placed around the target. Deposited particles on the substrate were analyzed by optical transmission spectroscopy. The surface roughness of the irradiated target was studied by atomic force microscopy, surface profilometry, and scanning electron microscopy. The experimental results were compared with the simulated angular distributions (programs OKSANA, SDTrimSP, and SRIM) and were found to be in reasonable agreement. In all cases, the angular distribution of sputtered particles showed an over‐cosine shape, which may be associated with noncompensated scattering of ejected particles by surface atoms when exiting the target. The results obtained are compared with the data from the literature.

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Angular distribution of atoms sputtered from germanium by 1–20 keV Ar ions

Cited by 12 publications

References 12 publications

The new mechanism of sputtering with cluster ion beams

The new mechanism of sputtering with cluster ion beams

The M+1AX phases: Materials science and thin-film processing

Angular distribution of particles sputtered from a copper target by 5‐keV Kr ions: Experiment and simulation study

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