Owing to its high melting temperature, the 4H-SiC substrate
exhibits
numerous defects that are difficult to remove, hindering the development
of large-scale, high electrical conductivity 4H-SiC substrates. This
study constructs and analyzes atomic models of point defects in 4H-SiC,
focusing mainly on Si and C atom vacancies and interstitial defects.
Point defects in 4H-SiC can increase the electrical conductivity.
For example, the Si0 vacancy has been found to enhance
the electrical conductivity of a 4H-SiC unit cell by more than 220
times, converting its wide bandgap property to metallic. The research
demonstrates that defects can improve 4H-SiC properties, paving the
way for defect-selective technology to develop large-scale, high electrical
conductivity 4H-SiC substrates.