AODO: Secondary ion emission and surface modification

Akcöltekin, S.; Alzaher, Ibrahim; d'Etat, Brigitte Ban; Been, T.; Boduch, P.; Cassimi, A.; Hijazi, Hussein; Lebius, H.; Manil, B.; Ramillon, Jean-Marc; Rothard, H.; Schleberger, Marika; Silveira, E.F. da

doi:10.1016/j.nimb.2008.11.018

Cited by 6 publications

(1 citation statement)

References 11 publications

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“…While intrinsic parameters can easily be found in the literature, the extrinsic parameters which are linked to the Auger spectrometer need to be determined. To measure them we used a setup (described by Akcöeltekin et al 18 ) dedicated to sample preparation and post-irradiation analysis. It is equipped for producing clean surface samples, depositing thin calibrated carbon films, and analyzing them with the Auger spectrometer.…”

Section: Aes Calibrationmentioning

confidence: 99%

New experimental setup for in situ measurement of slow ion induced sputtering

Salou,

Lebius,

Benyagoub

et al. 2013

Preprint

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A new experimental equipment allowing to study the sputtering induced by ion beam irradiation is presented. The sputtered particles are collected on a catcher which is analyzed in situ by Auger electron spectroscopy without breaking the ultra high vacuum (less than 10 −9 mbar), avoiding thus any problem linked to possible contamination. This method allows to measure the angular distribution of sputtering yield.Thanks to this new setup it is now possible to study the sputtering of many elements especially light elements such as carbon based materials. Preliminary results are presented in the case of highly oriented pyrolytic graphite and tungsten irradiated by an Ar + beam at respectively 2.8 keV and 7 keV.

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Section: Aes Calibrationmentioning

confidence: 99%

New experimental setup for in situ measurement of slow ion induced sputtering

Salou,

Lebius,

Benyagoub

et al. 2013

Preprint

Self Cite

View full text Add to dashboard Cite

show abstract

Interaction of swift ion beams with surfaces: Sputtering of secondary ions from LiF studied by XY-TOF-SIMS

Hijazi

Rothard

Boduch

et al. 2011

Nuclear Instruments and Methods in Physics Research Section B:

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An innovative experimental setup for the measurement of sputtering yield induced by keV energy ions

Salou

Lebius

Benyagoub

et al. 2013

Review of Scientific Instruments

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An innovative experimental equipment allowing to study the sputtering induced by ion beam irradiation is presented. The sputtered particles are collected on a catcher which is analyzed in situ by Auger electron spectroscopy without breaking the ultra high vacuum (less than 10(-9) mbar), avoiding thus any problem linked to possible contamination. This method allows to measure the angular distribution of sputtering yield. It is now possible to study the sputtering of many elements such as carbon based materials. Preliminary results are presented in the case of highly oriented pyrolytic graphite and tungsten irradiated by an Ar(+) beam at 2.8 keV and 7 keV, respectively.

show abstract

AODO: Secondary ion emission and surface modification

Cited by 6 publications

References 11 publications

New experimental setup for in situ measurement of slow ion induced sputtering

New experimental setup for in situ measurement of slow ion induced sputtering

Interaction of swift ion beams with surfaces: Sputtering of secondary ions from LiF studied by XY-TOF-SIMS

An innovative experimental setup for the measurement of sputtering yield induced by keV energy ions

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