2012
DOI: 10.1117/1.oe.51.7.078001
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Applicability of a binary amplitude mask for creating correctors of higher-order ocular aberrations in a photoresistive layer

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Cited by 2 publications
(1 citation statement)
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“…After the desired material is deposited on the substrate, the photolithography process starts with spin coating the substrate with a photoresist [204]. Hence, a polymeric photosensitive material can be spun onto the wafer in liquid from an adhesion promoter (such as hexamethyldisilazane, Si(CH 3 ) 3 NHSi(CH 3 ) 3 , HMDS) used prior to the application of the resist.…”
Section: Lithographic Processesmentioning
confidence: 99%
“…After the desired material is deposited on the substrate, the photolithography process starts with spin coating the substrate with a photoresist [204]. Hence, a polymeric photosensitive material can be spun onto the wafer in liquid from an adhesion promoter (such as hexamethyldisilazane, Si(CH 3 ) 3 NHSi(CH 3 ) 3 , HMDS) used prior to the application of the resist.…”
Section: Lithographic Processesmentioning
confidence: 99%