Application of Flow Field Analysis in Ion Beam Figuring for Ultra-Smooth Machining of Monocrystalline Silicon Mirror

Abstract

X-ray free-electron lasers are large modern scientific devices that play an important role in fields such as frontier physics and biomedicine. In this study, a light source is connected to an experimental station through beam lines, which requires numerous ultra-smooth and high-precision X-ray mirrors. Monocrystalline silicon is an ideal substrate material where ion-beam figuring is required. However, the ultra-smooth surface is damaged after the ion-beam figuring. Through an analysis of the machined surface, it is found that in the process of vacuum pumping, the impurities in the cavity adhere to the machined surface and increase the roughness after processing. Therefore, an optimized vacuum-pumping scheme is proposed. The experiment demonstrates that the original value of the processed surface roughness remains unchanged.

Theoretical and Experimental Investigation of Surface Textures in Vibration-Assisted Micro Milling

“…The widespread incorporation of surface texturing across various industries has motivated the pursuit of sophisticated manufacturing techniques that can effectively create intricate surface morphologies. The repertoire of established surface texturing techniques includes focused ion beam machining [ 6 , 7 ], electron beam machining [ 8 ], lithography, laser ablation, and micro-rolling [ 9 ]. However, restrictions have been identified regarding economic feasibility, process efficiency, material compatibility, geometric complexity, and scalability.…”

Алмаз-Карбид-Кремниевый Композит "Скелетон" Как Перспективный Материал Для Подложек Рентгенооптических Элементов

“…C развитием мощных источников синхротронного излучения (3+ и 4-го поколения), а также лазеров на свободных электронах [1-3] остро встала проблема прецизионных рентгенооптических элементов, стойких к большим (до нескольких kW) радиационным и тепловым нагрузкам. В настоящее время считается, что в качестве материала подложек для зеркал, работающих под столь мощными пучками излучения, может рассматриваться в первую очередь монокристаллический кремний [4][5][6]. Другие материалы, в том числе карбид кремния и металлы (медь, алюминий, бериллий) по своим теплофизическим характеристикам сильно ему уступают [7,8].…”

Diamond-carbide-silicon composite "skeleton" as a promising material for X-ray optical substrates

“…With the development of powerful synchrotron radiation sources (3+ and 4th generation), as well as free electron lasers [1-3], the problem of precision X-ray optical elements resistant to large (up to several kW) radiation and thermal loads has become acute. Currently, it is believed that single-crystal silicon can be considered primarily as a substrate material for mirrors operating under such powerful radiation beams [4][5][6]. Other materials, including silicon carbide and metals (copper, aluminum, beryllium), are significantly inferior to it in terms of their thermal and physical characteristics [7,8].…”