Application of surface acoustic wave devices for acceleration sensing

Lukyanov, Dmitry; Shevchenko, Sergey; Kukaev, Alexander S.; Filippova, E. O.; Khivrich, M.

doi:10.1109/meacs.2014.6986931

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2018

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“…Figure 5 shows that the triangular-shaped console provides a significant increase of the uniformity of the distribution of the relative deformations on its opposite surfaces indicated by a prolonged plateau on the relative deformations plot (see Figure 5 b) that is sufficient to accommodate a SAW resonator taking into account the available manufacturing accuracy [ 12 , 20 ].…”

Section: Resultsmentioning

confidence: 99%

Surface-Acoustic-Wave Sensor Design for Acceleration Measurement

Shevchenko

Kukaev

Khivrich

et al. 2018

Sensors

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We suggest a concept design of a SAW-based microaccelerometer with an original triangular-shaped console-type sensing element. Our design is particularly optimized to increase the robustness against positioning errors of the SAW resonators on the opposite sides of the console. We also describe the results of computer simulations and laboratory tests that are in a perfect agreement with each other and present the sensitivity characteristics of a manufactured experimental design device.

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Section: Resultsmentioning

confidence: 99%