We suggest a concept design of a SAW-based microaccelerometer with an original triangular-shaped console-type sensing element. Our design is particularly optimized to increase the robustness against positioning errors of the SAW resonators on the opposite sides of the console. We also describe the results of computer simulations and laboratory tests that are in a perfect agreement with each other and present the sensitivity characteristics of a manufactured experimental design device.

A new modification of an acceleration measurement sensor based on an acoustic waves resonance principle is proposed. Common angular-shaped sensors exhibit stress concentrations at the angular points near the origin points of destruction under external stresses; these points are the "Achilles' heel" of the entire design. To overcome the above limitation, we suggest an angular-free ring-shaped sensitive element design that is characterized by enhanced robustness against external stress. The analytical treatment is validated by computer simulation results performed using the COMSOL Multiphysics software package. For an appropriate model parameterization, an original experiment has been carried out to estimate the stress-strained robustness of two potential candidates for sensitive console materials. Moreover, characteristics of the proposed sensor design, such as sensitivity threshold and maximum stress, have been obtained from the simulation data. The above results indicate that the proposed concept offers a promising advancement in surface acoustic waves (SAW) based accelerometer devices, and could, therefore, be used for several practical applications in such areas as biomedical and sports wearable devices; vehicular design, including unmanned solutions; and industrial robotics, especially those where high-G forces are expected.

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The importance of the use of silica packing for gyroscopes and accelerometers quartz packaging is demonstrated. Technology of quartz packaging providing the ability to adjust the frequency of the laser resonator and the simultaneous formation of structures on opposite sides of the console using laser is discussed.Keywords -micro electromechanical systems (MEMS) micromechanical accelerometer (MMA); quartz packaging; laser frequency adjustment

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