TENCON 2012 IEEE Region 10 Conference 2012
DOI: 10.1109/tencon.2012.6412244
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Artificial neural network based hysteresis compensation for piezoelectric tube scanner in atomic force microscopy

Abstract: Piezoelectric tube scanner is a major component that used in nanoscale imaging tools such as atomic force microscopy (AFM). This is because it can provide precise nanoscale positioning. However the precision is limited by vibration and some nonlinear drawbacks represented by creep and hysteresis. Hysteresis problem appears when positioning is needed at wide range. In this paper, a feed forward multi-layer neural network (MLNN) is trained to shape a proper control signal based on reference input and actual outp… Show more

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Cited by 2 publications
(2 citation statements)
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“…The proposed method has a better performance than the backpropagation neural network with 0.01 least mean square error (MSE). Othman et al [22] have used an ANN for the compensation of hysteresis of a piezoelectric tube scanner. Patra et al [23] have designed the smart pressure sensor using ANN and compensate non-linearity, offset, and temperature dependency.…”
Section: Introductionmentioning
confidence: 99%
See 1 more Smart Citation
“…The proposed method has a better performance than the backpropagation neural network with 0.01 least mean square error (MSE). Othman et al [22] have used an ANN for the compensation of hysteresis of a piezoelectric tube scanner. Patra et al [23] have designed the smart pressure sensor using ANN and compensate non-linearity, offset, and temperature dependency.…”
Section: Introductionmentioning
confidence: 99%
“…Othman et al . [22] have used an ANN for the compensation of hysteresis of a piezoelectric tube scanner. Patra et al .…”
Section: Introductionmentioning
confidence: 99%