ARXPS ? Studies of nucleation and make-up of sputtered TiN-layers

Nucleation and growth of Ni-LIGA layers

“…As shown by Darlinski and Halbritter (1987), Hedbabny et al 3/2 peaks with fits at take-off angles :10°(above) and 60°(below). With increasing angle the shoulder at BE 856.0 eV consisting of NiO and higher oxides is decreasing because of shielding by metallic Ni (1987), Hornetz (1994) and Halbritter et al (1991 and1993), it is possible to sample the topmost 5-10 nm surface layer and identify different compounds. The background caused by inelastic processes was removed by Shirley background subtraction according to Briggs and Seah (1990) and Halbritter et al (1991 and1993), like the satellites.…”

Influence of the plasma nitriding conditions on the chemical and morphological characteristics of TiN coatings deposited on silicon

“…The A5 sample does not present either N1s nor Ti 2p spectra. The most prominent one for all samples (except A4) has a binding energy in the range of 396.4 -396.9 eV, and is associated to TiN [37][38][39][40][41] . The component at lower binding energy (395.5 -395.9 eV) can be attributed to N-C 41 ; the one at 398.2 -398.8 eV, to N-O (in TiO x N y ) 40,41 ; and the one that appears at higher binding energy for some samples could also be related to N-O bonds in an oxynitride compound 41 .…”

“…14). The component at 455.3 -455.5 eV is related to TiN [37][38][39][40][41] ; the one at 456.6 -456.8 eV, to TiO x N y ; the one at 458.5 -458.6 eV, to TiO 2 40,41 .…”

“…The most intense one presents a binding energy in the range of 529.5 -530.0 eV, and is associated to O 2-in oxides; the ; the one at 532.5 -532.7 eV is associated to O-C from atmospheric contamination 40 ; and the one at 534.1 -534-5 eV can be related to adsorbed water and/or alcohols 40 . The Ti 2p 3/2 peaks can be fitted three components (Fig.…”

Surface spectroscopic study of the behaviour of a thin TiN layer as protective coating of iron against corrosion by humid SO2-aggressive environments

“…The assignment of the other peaks in the N 1s spectra to di †erent chemical species is subjected, however, to some controversy : the contribution N1 at 395.8 eV has been associated in the literature both with NÈC bonds29 and with N in the oxynitride species,28 whilst contribution N3 at 398.5 eV has also been attributed to NÈO bonds in oxynitride compounds. 5,29,30 The N/Ti atomic ratio obtained from the XPS data is D1. 16 The O 1s spectra (not shown) contained four contributions.…”