2012 IEEE 62nd Electronic Components and Technology Conference 2012
DOI: 10.1109/ectc.2012.6248841
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Assembly and reliability challenges in 3D integration of 28nm FPGA die on a large high density 65nm passive interposer

Abstract: Assembly evaluations showed that the choice of the assembly process was strongly dependent on the die size, interposer design and interposer process. Choice of flux also affected the ubump assembly yield and underfill flow. Underfilling experiments confirmed that optimization of underfill process required optimization of dispense pattern, ubump parameters. Reliability evaluations showed that the reliability was affected by choice of underfill, interposer cleaning, and die thickness/package structure. One of th… Show more

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Cited by 106 publications
(31 citation statements)
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“…This means that a 12 inch silicon wafer with 730cm 2 of area would produce on average 0.3 working 6cm 2 dies, while the same wafer would produce on average 107 working 1.5cm 2 dies. Therefore, as a 6cm 2 chip would be composed of four 1.5cm 2 dies, the wafer would yield 26.75 systems on average, as the "assembly yield" of placing these four die on an interposer is very high [4]. Hence the number of interposer-based FPGAs created from the same silicon wafer would be almost 100× greater than a monolithic FPGA of the same size.…”
Section: Silicon Interposer Backgroundmentioning
confidence: 99%
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“…This means that a 12 inch silicon wafer with 730cm 2 of area would produce on average 0.3 working 6cm 2 dies, while the same wafer would produce on average 107 working 1.5cm 2 dies. Therefore, as a 6cm 2 chip would be composed of four 1.5cm 2 dies, the wafer would yield 26.75 systems on average, as the "assembly yield" of placing these four die on an interposer is very high [4]. Hence the number of interposer-based FPGAs created from the same silicon wafer would be almost 100× greater than a monolithic FPGA of the same size.…”
Section: Silicon Interposer Backgroundmentioning
confidence: 99%
“…Hence the area occupied by microbumps at one edge of one die is 13440 × (45µm) 2 = 27mm 2 . If we assume each die is 7 × 12mm, as presented by Chaware et al in [4], the bumps have to be spread out near the edge and need to go as far as 2.25mm away from the edge of the die. This greater distance from the border increaes the length of the inter-die connections, and along with the presence of the micro-bumps and their capacitance, leads to an increased delay for these crossing wires vs. that of a typical on-die routing wire.…”
Section: Virtex-7 Interposer-based Fpgasmentioning
confidence: 99%
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