Athermal metal optics made of nickel plated AlSi40

Gebhardt, Andreas; Kinast, Jan; Rohloff, Ralf-Rainer; Seifert, W.; Beier, Matthias; Scheiding, Sebastian; Peschel, Thomas

doi:10.1117/12.2304207

Cited by 6 publications

(6 citation statements)

References 8 publications

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“…38 Alternative aluminum alloy compositions as AlSi40 with improved CTE matching are under consideration. 48 However, for the present, NiP is the material of choice for fabricating UV/VIS mirror optics, because it is well-shapeable and reveals ultrasmooth surfaces after IBP. 49,50 Main goals for IBP are the reduction of the regularly aligned and distributed turning marks resulting from SPDT as well as the broadband smoothing of the optical surface in the roughness and the microroughness spatial frequency range (see Fig.…”

Section: Ultrasmooth Optical Surfaces With Aid Of An Isotropic Surfacmentioning

confidence: 95%

Finishing of metal optics by ion beam technologies

et al. 2019

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Ultraprecise mirror devices show considerable potential with view to applications in the visible and the ultraviolet spectral ranges. Aluminum alloys gather good mechanical and excellent optical properties and thus they emerge as important mirror construction materials. However, ultraprecision machining and polishing of optical aluminum surfaces are challenging, which originates from the high chemical reactivity and the heterogeneous matrix structure. Recently, several ion beam-based techniques have been developed to qualify aluminum mirrors for short-wavelength applications. We give an overview of the state-of-the-art ion beamprocessing techniques for figure error correction and planarization, either by direct aluminum machining or with the aid of polymer or inorganic, amorphous surface films.

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Section: Ultrasmooth Optical Surfaces With Aid Of An Isotropic Surfacmentioning

confidence: 95%

Finishing of metal optics by ion beam technologies

et al. 2019

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“…The honeycomb structure was replaced wit Voronoi cell pattern to make the design of the mirror's support more effective. A chosen as the substrate material, which CTE matches electroless nickel as plating was conducive to minimizing the influence of the bimetallic bending effect on the of mirrors [69][70][71][72][73][74].…”

Section: D Voronoimentioning

confidence: 99%

“…AlSi 40 was chosen as the substrate material, which CTE matches electroless nickel as plating. Thus, it was conducive to minimizing the influence of the bimetallic bending effect on the stability of mirrors [69][70][71][72][73][74].…”

Section: D Voronoimentioning

confidence: 99%

Design and Fabrication Technology of Metal Mirrors Based on Additive Manufacturing: A Review

et al. 2021

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In recent years, much progress has been made on the development of metal mirrors based on additive manufacturing (AM). The sandwich mirror is well known for its excellent mechanical properties and challenging machining. Now, AM can be used to fabricate this complex structure and reduce the processing time and cost. In addition, with the aid of some new design methods for additive manufacturing, such as lattice, topology optimization (TO), and Voronoi, the freedom of mirror structure design is enormously improved. The common materials of mirrors include ceramics (SiC), glasses (glass ceramics, fused silica), and metals (aluminum, beryllium). Among them, the AM technology of metals is the most mature and widely used. Researchers have recently extensively developed the new-generation metal mirror to improve performance and lightweight rate. This review focuses on the following topics: (1) AM technologies and powder materials for metal mirrors, (2) recent advances in optomechanical design methods for AM metal mirrors, (3) challenges faced by AM metal mirrors in fabricating, and (4) future trends in AM metal mirrors.

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“…The manufacturing of a complex geometry surface like freeform is suitable for NiP layer with a combination of sub-aperture correction and polishing techniques, like magnetorheological finishing and chemical mechanical polishing. [5,6] In the following article, a technology for smoothing metallic surfaces of amorphous electroless NiP by using ultra-precise diamond turning (DT) and chemical mechanical polishing (CMP) aiming at illumination optics will be presented. Special attention is given to the results of a microroughness (HSFR) < 0.2 nm RMS (AFM, 1 × 1 μm 2 ).…”

Section: Introductionmentioning

confidence: 99%

Super-polished metallic freeform optics for EUV-application

Porwol,

Kinast,

Cai

et al. 2024

Optical and EUV Nanolithography XXXVII

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Super-polished optics are crucial components for extremely short wavelength applications. One of the main applications are illumination optics. Short operational wavelengths of ~13,5 nm lead to high demands on substrate's surface quality, especially for microroughness features in the high spatial frequency range (HSFR). The excellent surface quality is essential for high-performant reflective mirrors.Typically, mirror substrates for EUV applications are made of glass, glass-ceramics and silicon. This paper describes an alternative approach by using metallic substrates made from electroless Nickel-Phosphorous (NiP) plated Aluminum alloys. The X-Ray amorphous NiP alloy enables several polishing and correction techniques to reduce the surface roughness down to the addressed sub-nm range. The process chain of metal optics includes ultra-precise diamond turning (DT) and chemical mechanical polishing (CMP) steps. Microroughness (HSFR) of < 0.2 nm RMS (AFM, 1 × 1 µm 2 ) by CMP could be generated on flat and curved surfaces as well as on freeform optics. The process chain will be verified by surface characterization techniques, e.g. atomic force microscopy and white light interferometry. The data is evaluated using the established PSD (power spectral density) analysis method. Conclusions about the surface errors concerning the different processing technologies can be verified. This paper shows that super-polished metallic freeform optics are suitable for curved EUV illumination optics.

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Athermal metal optics made of nickel plated AlSi40

Cited by 6 publications

References 8 publications

Finishing of metal optics by ion beam technologies

Finishing of metal optics by ion beam technologies

Design and Fabrication Technology of Metal Mirrors Based on Additive Manufacturing: A Review

Super-polished metallic freeform optics for EUV-application

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