2012
DOI: 10.1021/am301723d
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Atmospheric Plasma Deposited Dense Silica Coatings on Plastics

Abstract: We explore the application of a high-temperature precursor delivery system for depositing high boiling point organosilicate precursors on plastics using atmospheric plasma. Dense silica coatings were deposited on stretched poly(methyl methacrylate), polycarbonate and silicon substrates from the high boiling temperature precursor, 1, 2-bis(triethoxysilyl)ethane, and from two widely used low boiling temperature precursors, tetraethoxysilane and tetramethylcyclotetrasiloxane. The coating deposition rate, molecula… Show more

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Cited by 67 publications
(117 citation statements)
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“…An atmospheric pressure plasma system [Surfx Technologies LLC, Redondo Beach, CA] integrated with a hightemperature precursor delivery system was employed to pretreat the plastic substrates and deposit the coating. 16 The area of the plasma showerhead was 5.1 cm 2 . A total of 99.995% purity quality helium and oxygen [Praxair Inc., Santa Clara, CA] were mixed and fed into the capacitive discharge plasma.…”
Section: ■ Experimental Methodsmentioning
confidence: 97%
“…An atmospheric pressure plasma system [Surfx Technologies LLC, Redondo Beach, CA] integrated with a hightemperature precursor delivery system was employed to pretreat the plastic substrates and deposit the coating. 16 The area of the plasma showerhead was 5.1 cm 2 . A total of 99.995% purity quality helium and oxygen [Praxair Inc., Santa Clara, CA] were mixed and fed into the capacitive discharge plasma.…”
Section: ■ Experimental Methodsmentioning
confidence: 97%
“…It permits to measure the adhesion in J.m -2 (G c ) by applying loads/unloads at a controlled displacement rate to produce coating cracks growth [50]. G c is then calculated using the Kanninen corrected equation [51]:…”
Section: Adherencementioning
confidence: 99%
“…This membrane also showed high H 2 /CH 4 (10.5) and H 2 /N 2 (12.4) selectivities in a separation test of gas mixtures [25]. However, the deposition of a more promising organosilica layer between rigid inorganic and flexible polymeric materials on polymer has been demonstrated [26,27]. Ngamou et al proposed the use of an expanding thermal plasma chemical vapor deposition (ETP-CVD) technique in order to fabricate a BTESE-derived silica layer on a porous polyamide-imide substrate for n-butanol dehydration [28].…”
Section: Introductionmentioning
confidence: 98%